JPS635918B2 - - Google Patents

Info

Publication number
JPS635918B2
JPS635918B2 JP54111702A JP11170279A JPS635918B2 JP S635918 B2 JPS635918 B2 JP S635918B2 JP 54111702 A JP54111702 A JP 54111702A JP 11170279 A JP11170279 A JP 11170279A JP S635918 B2 JPS635918 B2 JP S635918B2
Authority
JP
Japan
Prior art keywords
conductor
printing
paste
hole
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54111702A
Other languages
Japanese (ja)
Other versions
JPS5636200A (en
Inventor
Kazuyuki Fujimoto
Masanori Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11170279A priority Critical patent/JPS5636200A/en
Publication of JPS5636200A publication Critical patent/JPS5636200A/en
Publication of JPS635918B2 publication Critical patent/JPS635918B2/ja
Granted legal-status Critical Current

Links

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  • Production Of Multi-Layered Print Wiring Board (AREA)

Description

【発明の詳細な説明】 本発明は厚膜多層配線基板の製造方法、特にそ
の多層配線回路のスルーホールの形成方法に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a thick film multilayer wiring board, and particularly to a method for forming through holes in the multilayer wiring circuit.

従来厚膜多層配線回路は基板の所定の位置に導
体ペーストを印刷焼成後、その導体上に所定の寸
法を有するスルーホールの形を残す如く絶縁ペー
ストを印刷焼成して絶縁層を形成し、その上に導
体ペーストを印刷し、焼成することにより多層配
線回路を作製していた。第1図は前記従来の多層
配線回路基板の製造方法を示すものであり、1は
基板を示し、該基板上に導体ペーストを印刷焼成
して導体2を形成し(第1図のa)、前記導体2
上にスルーホールの巾xを有せしむる如く絶縁ペ
ーストを印刷、焼成して絶縁層4を形成し(第1
図のb)、その上に導体ペーストを印刷、焼成す
ることにより上部導体5を形成し、前記スルーホ
ールにより上下の導体2と5とが接続されるよう
にしている。(第1図のc)。
Conventionally, thick film multilayer wiring circuits are made by printing and firing a conductive paste at a predetermined position on a board, and then printing and firing an insulating paste so as to leave the shape of a through hole with a predetermined size on the conductor to form an insulating layer. A multilayer wiring circuit was produced by printing a conductive paste on top and firing it. FIG. 1 shows the conventional method for manufacturing the multilayer wiring circuit board, in which 1 indicates a substrate, and a conductor paste is printed and fired on the substrate to form a conductor 2 (a in FIG. 1). Said conductor 2
An insulating paste is printed on the top so as to have the width x of the through hole and fired to form an insulating layer 4 (first
b) in the figure, an upper conductor 5 is formed by printing and firing a conductor paste thereon, and the upper and lower conductors 2 and 5 are connected through the through hole. (c in Figure 1).

しかし乍ら印刷時に絶縁ペーストでスルーホー
ルの垂直面x′を形成することは不可能であり、謂
所印刷のだれyが必然的に発生し、所定のスルー
ホールの寸法xに対し、実際得られるスルーホー
ル寸法はきわめて小さくなり、このため、特に微
少スルーホールを精度良く形成することは困難で
あつた。
However, it is impossible to form the vertical plane x' of the through hole with insulating paste during printing, and so-called printing sag y inevitably occurs, and the actual yield for a given through hole dimension x is impossible. The dimensions of the through-holes that can be formed have become extremely small, making it difficult to form particularly minute through-holes with high precision.

本発明は前記の欠点を改善せんがため、基板に
先づ導体ペーストで導体を印刷、焼成し、前記導
体上に所定の寸法を有するスルーホール形成部
を、高温焼成により酸化又は熱分解し消失する有
機物ペーストで印刷し、それから絶縁ペーストで
前記基板および導体上を覆う如く絶縁層を印刷
し、これを焼成することにより前記有機物ペース
トを消失させて絶縁層中に所定のスルーホールを
形成せしめ、前記絶縁層およびスルーホール上に
導体ペーストを印刷、焼成することにより基板上
の上下の二つの導体層を接続するようにしたもの
である。なお、前記有機物ペーストは通常の厚膜
印刷技術で用いられるペースト(とくに導体ペー
ストに適用する)であり、主としてエチルセルロ
ース、ポリビニルアルコール、ジブチルフタレー
トなどからなるものである。これらの成分は、い
ずれも高温において酸化、気化して残留物を残さ
ない物質である。
In order to improve the above-mentioned drawbacks, the present invention first prints a conductor using conductor paste on the substrate and fires it, and then oxidizes or thermally decomposes the through-hole forming part having a predetermined size on the conductor and disappears by firing at a high temperature. printing with an organic paste, then printing an insulating layer so as to cover the substrate and the conductor with an insulating paste, and baking this to eliminate the organic paste and form a predetermined through hole in the insulating layer, The two upper and lower conductor layers on the substrate are connected by printing and baking a conductor paste on the insulating layer and through holes. The organic paste is a paste used in normal thick film printing technology (particularly applicable to conductor pastes), and is mainly composed of ethyl cellulose, polyvinyl alcohol, dibutyl phthalate, and the like. All of these components are substances that oxidize and vaporize at high temperatures, leaving no residue.

次に本発明の一実施例を第2図について説明す
る。第2図において1は配線基板、2はその上に
印刷、焼成により形成した導体である。本発明に
おいては、前記導体2の上に所定の寸法xを有す
るスルーホール形成部3を高温では酸化又は熱分
解して消失する有機物ペーストにより印刷する
(第2図b)。続いて前記スルーホール形成部3を
含む前記基板1および導体2の上部全面に所定の
寸法を有する絶縁層4を絶縁ペーストで印刷し、
これを焼成することにより、前記導体2上に印刷
したスルーホール用の有機物ペースト3を消失さ
せ、絶縁層4中にスルーホール3′を形成させる
(第2図c)。このようにして正確な寸法のスルホ
ール3′を形成した後、その絶縁層4上に導体層
5を導体ペーストで印刷し、焼成して多層配線基
板を構成する。なお前記有機物ペーストで印刷す
るスルーホール形成部3にも印刷のダレ現象は表
れるが、スルーホールの寸法は元々極めて小さい
ので、ダレ寸法も極めて小さく、実用上問題とは
なり得ない。
Next, one embodiment of the present invention will be described with reference to FIG. In FIG. 2, 1 is a wiring board, and 2 is a conductor formed thereon by printing and firing. In the present invention, a through-hole forming portion 3 having a predetermined dimension x is printed on the conductor 2 using an organic paste that disappears by oxidation or thermal decomposition at high temperatures (FIG. 2b). Subsequently, an insulating layer 4 having predetermined dimensions is printed on the entire upper surface of the substrate 1 and the conductor 2 including the through-hole forming portion 3 using an insulating paste,
By firing this, the organic paste 3 for through holes printed on the conductor 2 disappears, and through holes 3' are formed in the insulating layer 4 (FIG. 2c). After forming the through-holes 3' with accurate dimensions in this way, a conductor layer 5 is printed with conductor paste on the insulating layer 4 and fired to form a multilayer wiring board. Note that printing sag phenomenon also appears in the through-hole forming portion 3 printed with the organic paste, but since the dimensions of the through-holes are originally extremely small, the sag dimensions are also extremely small and cannot be a problem in practice.

本発明は、前記の如く、配線基板に印刷、焼成
により設けた導体上に、上下の導体を接続するス
ルーホール形成部を印刷してスルーホール寸法を
確保し、しかる後絶縁層を印刷し、焼成すること
により前記スルーホール形成部を消失させてスル
ーホール形成し、しかる後その上に導体層を印
刷、焼成するようにしたので絶縁物層に穴をあけ
る工程が不用で、厚膜印刷技術のみで微少スルー
ホールを精度よく形成させることが出来る効果が
ある。
As described above, the present invention prints a through-hole forming part for connecting the upper and lower conductors on the conductor provided by printing and firing on the wiring board to ensure the through-hole dimension, and then prints an insulating layer, By firing, the through-hole forming part disappears and a through-hole is formed, and then a conductor layer is printed and fired on top of it, so there is no need for the process of drilling holes in the insulating layer, and thick film printing technology is used. This has the effect of allowing minute through holes to be formed with high accuracy using only a single step.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の多層配線基板の製造方法を示す
説明図、第2図は本発明多層配線基板の製造方法
を示す説明図である。 1…基板、2…導体層、3…スルーホール形成
部、3′…スルーホール形成部3の消失によつて
形成されたスルーホール、4…絶縁層、5…導体
層。
FIG. 1 is an explanatory diagram showing a conventional method for manufacturing a multilayer wiring board, and FIG. 2 is an explanatory diagram showing a method for manufacturing a multilayer wiring board according to the present invention. DESCRIPTION OF SYMBOLS 1...Substrate, 2...Conductor layer, 3...Through hole formation part, 3'...Through hole formed by disappearance of the through hole formation part 3, 4...Insulating layer, 5...Conductor layer.

Claims (1)

【特許請求の範囲】[Claims] 1 基板上に形成した下部導体に、高温焼成によ
り酸化又は熱分解して消失する有機物ペーストに
てスルーホール形成部を印刷し、該スルーホール
形成部を含む下部導体上に絶縁層を印刷し、該絶
縁層を焼成することにより前記スルーホール形成
部を焼失させてスルーホールを形成することを特
徴とする厚膜多層配線基板の製造法。
1. Printing a through-hole forming part on the lower conductor formed on the substrate with an organic paste that disappears by oxidation or thermal decomposition by high-temperature firing, printing an insulating layer on the lower conductor including the through-hole forming part, A method for manufacturing a thick film multilayer wiring board, characterized in that the through hole forming portion is burned out by firing the insulating layer to form a through hole.
JP11170279A 1979-09-03 1979-09-03 Method of manufacturing thick film multilayer wired substrate Granted JPS5636200A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11170279A JPS5636200A (en) 1979-09-03 1979-09-03 Method of manufacturing thick film multilayer wired substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11170279A JPS5636200A (en) 1979-09-03 1979-09-03 Method of manufacturing thick film multilayer wired substrate

Publications (2)

Publication Number Publication Date
JPS5636200A JPS5636200A (en) 1981-04-09
JPS635918B2 true JPS635918B2 (en) 1988-02-05

Family

ID=14567983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11170279A Granted JPS5636200A (en) 1979-09-03 1979-09-03 Method of manufacturing thick film multilayer wired substrate

Country Status (1)

Country Link
JP (1) JPS5636200A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0443170Y2 (en) * 1987-05-08 1992-10-13

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5422574A (en) * 1977-07-21 1979-02-20 Fujitsu Ltd Method of making ceramic multiilayer circuit substrate
JPS5570099A (en) * 1978-11-21 1980-05-27 Nippon Electric Co Method of manufacturing high packing density package substrate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5422574A (en) * 1977-07-21 1979-02-20 Fujitsu Ltd Method of making ceramic multiilayer circuit substrate
JPS5570099A (en) * 1978-11-21 1980-05-27 Nippon Electric Co Method of manufacturing high packing density package substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0443170Y2 (en) * 1987-05-08 1992-10-13

Also Published As

Publication number Publication date
JPS5636200A (en) 1981-04-09

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