JPS6358831A - 異形基板のレジスト剥離方法および装置 - Google Patents

異形基板のレジスト剥離方法および装置

Info

Publication number
JPS6358831A
JPS6358831A JP20150986A JP20150986A JPS6358831A JP S6358831 A JPS6358831 A JP S6358831A JP 20150986 A JP20150986 A JP 20150986A JP 20150986 A JP20150986 A JP 20150986A JP S6358831 A JPS6358831 A JP S6358831A
Authority
JP
Japan
Prior art keywords
resist
substrate
stripping liquid
gas
jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20150986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0226372B2 (enrdf_load_stackoverflow
Inventor
Kenji Sakashita
健司 坂下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Engineering Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Engineering Works Co Ltd filed Critical Shibaura Engineering Works Co Ltd
Priority to JP20150986A priority Critical patent/JPS6358831A/ja
Publication of JPS6358831A publication Critical patent/JPS6358831A/ja
Publication of JPH0226372B2 publication Critical patent/JPH0226372B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP20150986A 1986-08-29 1986-08-29 異形基板のレジスト剥離方法および装置 Granted JPS6358831A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20150986A JPS6358831A (ja) 1986-08-29 1986-08-29 異形基板のレジスト剥離方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20150986A JPS6358831A (ja) 1986-08-29 1986-08-29 異形基板のレジスト剥離方法および装置

Publications (2)

Publication Number Publication Date
JPS6358831A true JPS6358831A (ja) 1988-03-14
JPH0226372B2 JPH0226372B2 (enrdf_load_stackoverflow) 1990-06-08

Family

ID=16442227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20150986A Granted JPS6358831A (ja) 1986-08-29 1986-08-29 異形基板のレジスト剥離方法および装置

Country Status (1)

Country Link
JP (1) JPS6358831A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4115510A1 (de) * 1990-05-21 1991-11-28 Hamatech Halbleiter Maschinenb Vorrichtung zur randentlackung einer substrats
US5443942A (en) * 1990-11-28 1995-08-22 Canon Kabushiki Kaisha Process for removing resist

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4115510A1 (de) * 1990-05-21 1991-11-28 Hamatech Halbleiter Maschinenb Vorrichtung zur randentlackung einer substrats
US5443942A (en) * 1990-11-28 1995-08-22 Canon Kabushiki Kaisha Process for removing resist

Also Published As

Publication number Publication date
JPH0226372B2 (enrdf_load_stackoverflow) 1990-06-08

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