JPS635856B2 - - Google Patents

Info

Publication number
JPS635856B2
JPS635856B2 JP54082460A JP8246079A JPS635856B2 JP S635856 B2 JPS635856 B2 JP S635856B2 JP 54082460 A JP54082460 A JP 54082460A JP 8246079 A JP8246079 A JP 8246079A JP S635856 B2 JPS635856 B2 JP S635856B2
Authority
JP
Japan
Prior art keywords
deflection
beam current
conditions
points
under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54082460A
Other languages
English (en)
Japanese (ja)
Other versions
JPS567338A (en
Inventor
Fumio Kataki
Keiichiro Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP8246079A priority Critical patent/JPS567338A/ja
Publication of JPS567338A publication Critical patent/JPS567338A/ja
Publication of JPS635856B2 publication Critical patent/JPS635856B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP8246079A 1979-06-29 1979-06-29 Automatic axis aligment in electron microscope Granted JPS567338A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8246079A JPS567338A (en) 1979-06-29 1979-06-29 Automatic axis aligment in electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8246079A JPS567338A (en) 1979-06-29 1979-06-29 Automatic axis aligment in electron microscope

Publications (2)

Publication Number Publication Date
JPS567338A JPS567338A (en) 1981-01-26
JPS635856B2 true JPS635856B2 (enrdf_load_stackoverflow) 1988-02-05

Family

ID=13775113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8246079A Granted JPS567338A (en) 1979-06-29 1979-06-29 Automatic axis aligment in electron microscope

Country Status (1)

Country Link
JP (1) JPS567338A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2777505B2 (ja) * 1992-07-29 1998-07-16 株式会社日立製作所 自動分析電子顕微鏡および分析評価方法

Also Published As

Publication number Publication date
JPS567338A (en) 1981-01-26

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