JPS567338A - Automatic axis aligment in electron microscope - Google Patents

Automatic axis aligment in electron microscope

Info

Publication number
JPS567338A
JPS567338A JP8246079A JP8246079A JPS567338A JP S567338 A JPS567338 A JP S567338A JP 8246079 A JP8246079 A JP 8246079A JP 8246079 A JP8246079 A JP 8246079A JP S567338 A JPS567338 A JP S567338A
Authority
JP
Japan
Prior art keywords
points
point
new
aligment
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8246079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS635856B2 (enrdf_load_stackoverflow
Inventor
Fumio Kataki
Keiichiro Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP8246079A priority Critical patent/JPS567338A/ja
Publication of JPS567338A publication Critical patent/JPS567338A/ja
Publication of JPS635856B2 publication Critical patent/JPS635856B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP8246079A 1979-06-29 1979-06-29 Automatic axis aligment in electron microscope Granted JPS567338A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8246079A JPS567338A (en) 1979-06-29 1979-06-29 Automatic axis aligment in electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8246079A JPS567338A (en) 1979-06-29 1979-06-29 Automatic axis aligment in electron microscope

Publications (2)

Publication Number Publication Date
JPS567338A true JPS567338A (en) 1981-01-26
JPS635856B2 JPS635856B2 (enrdf_load_stackoverflow) 1988-02-05

Family

ID=13775113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8246079A Granted JPS567338A (en) 1979-06-29 1979-06-29 Automatic axis aligment in electron microscope

Country Status (1)

Country Link
JP (1) JPS567338A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5350921A (en) * 1992-07-29 1994-09-27 Hitachi, Ltd. Analytical electron microscope and a method of operating such an electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5350921A (en) * 1992-07-29 1994-09-27 Hitachi, Ltd. Analytical electron microscope and a method of operating such an electron microscope

Also Published As

Publication number Publication date
JPS635856B2 (enrdf_load_stackoverflow) 1988-02-05

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