JPS6357644B2 - - Google Patents
Info
- Publication number
- JPS6357644B2 JPS6357644B2 JP56002123A JP212381A JPS6357644B2 JP S6357644 B2 JPS6357644 B2 JP S6357644B2 JP 56002123 A JP56002123 A JP 56002123A JP 212381 A JP212381 A JP 212381A JP S6357644 B2 JPS6357644 B2 JP S6357644B2
- Authority
- JP
- Japan
- Prior art keywords
- support mechanism
- supported
- acceleration
- support
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001133 acceleration Effects 0.000 claims description 24
- 238000006073 displacement reaction Methods 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Automatic Control Of Machine Tools (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP212381A JPS57116931A (en) | 1981-01-12 | 1981-01-12 | Controllable support system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP212381A JPS57116931A (en) | 1981-01-12 | 1981-01-12 | Controllable support system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57116931A JPS57116931A (en) | 1982-07-21 |
JPS6357644B2 true JPS6357644B2 (US06330241-20011211-M00004.png) | 1988-11-11 |
Family
ID=11520569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP212381A Granted JPS57116931A (en) | 1981-01-12 | 1981-01-12 | Controllable support system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57116931A (US06330241-20011211-M00004.png) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03117117U (US06330241-20011211-M00004.png) * | 1990-01-23 | 1991-12-04 | ||
JPH044522U (US06330241-20011211-M00004.png) * | 1990-04-26 | 1992-01-16 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2561738B1 (fr) * | 1984-03-26 | 1986-08-22 | Europ Propulsion | Procede et dispositif de reduction des vibrations des machines tournantes equipees d'une suspension magnetique active |
JPS6124816A (ja) * | 1984-07-11 | 1986-02-03 | Toshiba Corp | 非線形制御型磁気軸受 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5399178A (en) * | 1977-02-04 | 1978-08-30 | Europ Propulsion | Device for horizontally stabilizing vertically supported body |
-
1981
- 1981-01-12 JP JP212381A patent/JPS57116931A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5399178A (en) * | 1977-02-04 | 1978-08-30 | Europ Propulsion | Device for horizontally stabilizing vertically supported body |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03117117U (US06330241-20011211-M00004.png) * | 1990-01-23 | 1991-12-04 | ||
JPH044522U (US06330241-20011211-M00004.png) * | 1990-04-26 | 1992-01-16 |
Also Published As
Publication number | Publication date |
---|---|
JPS57116931A (en) | 1982-07-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3273026B2 (ja) | 表面追従型測定機 | |
US4193644A (en) | Servo control system | |
JPH04230801A (ja) | 走査ヘッド | |
JPS6357644B2 (US06330241-20011211-M00004.png) | ||
US5212657A (en) | Kinetofrictional force testing apparatus | |
US6448723B1 (en) | Stage system and exposure apparatus | |
JPS6318681B2 (US06330241-20011211-M00004.png) | ||
JPS5969245A (ja) | 切削状態検出装置 | |
EP0378678A1 (en) | ELECTROMAGNETIC BEARINGS. | |
CN112828609B (zh) | 龙门机构线上惯量匹配同步控制方法 | |
JPS6162110A (ja) | 精密試料移動装置 | |
US4085811A (en) | Electromagnetically compensating beamless dynamometer or weighing device | |
US3394384A (en) | Recording test equipment and circuit | |
JPH0824437B2 (ja) | 位置決め装置 | |
US4202205A (en) | Integral torquer for mass measurement system | |
JP2780847B2 (ja) | コイルを可動部に用いた駆動装置 | |
JPS6131793Y2 (US06330241-20011211-M00004.png) | ||
JP2747254B2 (ja) | 流体軸受装置 | |
JP2947993B2 (ja) | 加速度センサ | |
JPH09239628A (ja) | 自重支持装置 | |
JP2770978B2 (ja) | 位置制御方法およびその位置決め装置 | |
JPS586162B2 (ja) | 微小位置決め装置 | |
JPH09216137A (ja) | 位置決め装置 | |
JPH05231428A (ja) | 磁気軸受の制御方法および制御装置 | |
JPH0635152Y2 (ja) | リニアモータの試験装置 |