JPS6356702B2 - - Google Patents

Info

Publication number
JPS6356702B2
JPS6356702B2 JP24639883A JP24639883A JPS6356702B2 JP S6356702 B2 JPS6356702 B2 JP S6356702B2 JP 24639883 A JP24639883 A JP 24639883A JP 24639883 A JP24639883 A JP 24639883A JP S6356702 B2 JPS6356702 B2 JP S6356702B2
Authority
JP
Japan
Prior art keywords
pattern
reference marks
inspected
output
deviation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP24639883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60138921A (ja
Inventor
Tomohide Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP58246398A priority Critical patent/JPS60138921A/ja
Publication of JPS60138921A publication Critical patent/JPS60138921A/ja
Publication of JPS6356702B2 publication Critical patent/JPS6356702B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP58246398A 1983-12-27 1983-12-27 パタ−ン形状検査装置 Granted JPS60138921A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58246398A JPS60138921A (ja) 1983-12-27 1983-12-27 パタ−ン形状検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58246398A JPS60138921A (ja) 1983-12-27 1983-12-27 パタ−ン形状検査装置

Publications (2)

Publication Number Publication Date
JPS60138921A JPS60138921A (ja) 1985-07-23
JPS6356702B2 true JPS6356702B2 (fr) 1988-11-09

Family

ID=17147916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58246398A Granted JPS60138921A (ja) 1983-12-27 1983-12-27 パタ−ン形状検査装置

Country Status (1)

Country Link
JP (1) JPS60138921A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63286752A (ja) * 1987-05-20 1988-11-24 Toshiba Mach Co Ltd パタ−ンの欠陥検査または寸法測定方法
KR100265827B1 (ko) * 1993-10-30 2000-09-15 김영환 레티클 제조 정확도 측정방법
JP4767665B2 (ja) * 2005-01-05 2011-09-07 富士通セミコンダクター株式会社 レチクル検査装置およびレチクル検査方法
JP5793093B2 (ja) * 2012-02-17 2015-10-14 株式会社ニューフレアテクノロジー 検査装置および検査方法
JP2014211352A (ja) * 2013-04-18 2014-11-13 株式会社東芝 テンプレートの検査装置及びテンプレートの検査方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654038A (en) * 1979-10-08 1981-05-13 Toshiba Corp Checking device for shape of photomask
JPS5837923A (ja) * 1981-08-31 1983-03-05 Toshiba Corp フオトマスクの検査装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654038A (en) * 1979-10-08 1981-05-13 Toshiba Corp Checking device for shape of photomask
JPS5837923A (ja) * 1981-08-31 1983-03-05 Toshiba Corp フオトマスクの検査装置

Also Published As

Publication number Publication date
JPS60138921A (ja) 1985-07-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term