JPS6355637B2 - - Google Patents

Info

Publication number
JPS6355637B2
JPS6355637B2 JP55062985A JP6298580A JPS6355637B2 JP S6355637 B2 JPS6355637 B2 JP S6355637B2 JP 55062985 A JP55062985 A JP 55062985A JP 6298580 A JP6298580 A JP 6298580A JP S6355637 B2 JPS6355637 B2 JP S6355637B2
Authority
JP
Japan
Prior art keywords
liquid
temperature control
temperature
tank
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55062985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56160585A (en
Inventor
Isakata Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOMATSU EREKUTORONIKUSU KK
Original Assignee
KOMATSU EREKUTORONIKUSU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOMATSU EREKUTORONIKUSU KK filed Critical KOMATSU EREKUTORONIKUSU KK
Priority to JP6298580A priority Critical patent/JPS56160585A/ja
Publication of JPS56160585A publication Critical patent/JPS56160585A/ja
Publication of JPS6355637B2 publication Critical patent/JPS6355637B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
  • Control Of Temperature (AREA)
JP6298580A 1980-05-13 1980-05-13 Heat exchanging method Granted JPS56160585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6298580A JPS56160585A (en) 1980-05-13 1980-05-13 Heat exchanging method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6298580A JPS56160585A (en) 1980-05-13 1980-05-13 Heat exchanging method

Publications (2)

Publication Number Publication Date
JPS56160585A JPS56160585A (en) 1981-12-10
JPS6355637B2 true JPS6355637B2 (cg-RX-API-DMAC7.html) 1988-11-02

Family

ID=13216156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6298580A Granted JPS56160585A (en) 1980-05-13 1980-05-13 Heat exchanging method

Country Status (1)

Country Link
JP (1) JPS56160585A (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01307302A (ja) * 1988-06-06 1989-12-12 Nec Corp 携帯無線機用ループアンテナ
JPH04196727A (ja) * 1990-11-27 1992-07-16 Matsushita Electric Ind Co Ltd 小型電子機器用表示装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102393160B (zh) * 2011-11-10 2013-07-17 广州市高衡力节能科技股份有限公司 对称平衡式导流器装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5230953A (en) * 1975-09-03 1977-03-09 Mitsubishi Heavy Ind Ltd Heat-exchanging process by mixing two liquids

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01307302A (ja) * 1988-06-06 1989-12-12 Nec Corp 携帯無線機用ループアンテナ
JPH04196727A (ja) * 1990-11-27 1992-07-16 Matsushita Electric Ind Co Ltd 小型電子機器用表示装置

Also Published As

Publication number Publication date
JPS56160585A (en) 1981-12-10

Similar Documents

Publication Publication Date Title
CN111552359B (zh) 浸没式液体冷却槽及冷却装置
CN111615291A (zh) 浸没式冷却装置
US20130248157A1 (en) Method of coating a part of a heat exchanger and heat exchanger
CN217160341U (zh) 单相浸没式冷却系统
JPS6355637B2 (cg-RX-API-DMAC7.html)
JPS6289052A (ja) 写真感光材料処理装置
KR19990067782A (ko) 정밀 유체온도 조절장치
JPH0317443A (ja) 熱交換装置
TWI804268B (zh) 單相浸沒式冷卻系統
CN110993539A (zh) 温控装置及半导体加工设备
US3469625A (en) Heat exchanger for cooling liquids
SU981813A1 (ru) Установка дл нагрева и охлаждени агрессивных жидкостей
CN215917354U (zh) 一种废硫酸处理反应槽降温装置
JPWO2020202499A1 (ja) 熱交換装置および製造方法
JPH0616215Y2 (ja) 熱交換装置
KR100741475B1 (ko) 반도체 웨이퍼 습식 식각 및 세정 약품 가열용 인라인 히터
KR100741478B1 (ko) 반도체 공정액 항온기
KR101813897B1 (ko) 약액온도 조절장치, 이를 이용한 기판처리 시스템 및 기판처리방법
RU2004860C1 (ru) Объемна гидропередача
CN210400060U (zh) 一种换热器均流装置
SU1416161A1 (ru) Пленочный трубчатый тепломассообменный аппарат
CN222883621U (zh) 电池包液冷循环装置
CN114375132B (zh) 用于防凝露的电子器件散热系统及水上机械设备
JPH0321348A (ja) 恒温装置
JP2004020096A (ja) 多管式伝熱撹拌装置