JPS6355429U - - Google Patents
Info
- Publication number
- JPS6355429U JPS6355429U JP14829086U JP14829086U JPS6355429U JP S6355429 U JPS6355429 U JP S6355429U JP 14829086 U JP14829086 U JP 14829086U JP 14829086 U JP14829086 U JP 14829086U JP S6355429 U JPS6355429 U JP S6355429U
- Authority
- JP
- Japan
- Prior art keywords
- substrates
- cassette
- chamber
- stock
- introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000010408 film Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 230000003028 elevating effect Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14829086U JPS6355429U (no) | 1986-09-27 | 1986-09-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14829086U JPS6355429U (no) | 1986-09-27 | 1986-09-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6355429U true JPS6355429U (no) | 1988-04-13 |
Family
ID=31062418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14829086U Pending JPS6355429U (no) | 1986-09-27 | 1986-09-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6355429U (no) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010219281A (ja) * | 2009-03-17 | 2010-09-30 | Tokyo Electron Ltd | 基板処理システム及び基板処理方法 |
-
1986
- 1986-09-27 JP JP14829086U patent/JPS6355429U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010219281A (ja) * | 2009-03-17 | 2010-09-30 | Tokyo Electron Ltd | 基板処理システム及び基板処理方法 |
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