JPS6353493B2 - - Google Patents

Info

Publication number
JPS6353493B2
JPS6353493B2 JP55061010A JP6101080A JPS6353493B2 JP S6353493 B2 JPS6353493 B2 JP S6353493B2 JP 55061010 A JP55061010 A JP 55061010A JP 6101080 A JP6101080 A JP 6101080A JP S6353493 B2 JPS6353493 B2 JP S6353493B2
Authority
JP
Japan
Prior art keywords
lens
light source
inspected
image
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55061010A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56157841A (en
Inventor
Shuji Takaoka
Toshihiko Oomichi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP6101080A priority Critical patent/JPS56157841A/ja
Publication of JPS56157841A publication Critical patent/JPS56157841A/ja
Publication of JPS6353493B2 publication Critical patent/JPS6353493B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP6101080A 1980-05-07 1980-05-07 Detecting apparatus for surface defect of body Granted JPS56157841A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6101080A JPS56157841A (en) 1980-05-07 1980-05-07 Detecting apparatus for surface defect of body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6101080A JPS56157841A (en) 1980-05-07 1980-05-07 Detecting apparatus for surface defect of body

Publications (2)

Publication Number Publication Date
JPS56157841A JPS56157841A (en) 1981-12-05
JPS6353493B2 true JPS6353493B2 (pt) 1988-10-24

Family

ID=13158928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6101080A Granted JPS56157841A (en) 1980-05-07 1980-05-07 Detecting apparatus for surface defect of body

Country Status (1)

Country Link
JP (1) JPS56157841A (pt)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4547073A (en) * 1981-02-17 1985-10-15 Matsushita Electric Industrial Co., Ltd. Surface examining apparatus and method
JPS59150331A (ja) * 1983-02-16 1984-08-28 Toyota Tsusho Kk 球状又は円筒状表面を有する物体の表面検査装置
JP2011107092A (ja) * 2009-11-20 2011-06-02 Kobelco Kaken:Kk 表面検査装置及び表面検査システム
CN112630232B (zh) * 2020-12-01 2021-12-03 北京理工大学 差动共焦定面干涉靶丸内、外表面缺陷检测方法与装置
CN112666172B (zh) * 2020-12-01 2022-02-11 北京理工大学 差动共焦定面干涉靶丸外表面缺陷检测方法与装置
CN112683918B (zh) * 2020-12-01 2022-02-11 北京理工大学 差动共焦定面干涉靶丸内表面缺陷检测方法与装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS446160Y1 (pt) * 1965-08-28 1969-03-05
JPS4963459A (pt) * 1972-10-16 1974-06-19

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS446160Y1 (pt) * 1965-08-28 1969-03-05
JPS4963459A (pt) * 1972-10-16 1974-06-19

Also Published As

Publication number Publication date
JPS56157841A (en) 1981-12-05

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