JPS6352254U - - Google Patents

Info

Publication number
JPS6352254U
JPS6352254U JP14501586U JP14501586U JPS6352254U JP S6352254 U JPS6352254 U JP S6352254U JP 14501586 U JP14501586 U JP 14501586U JP 14501586 U JP14501586 U JP 14501586U JP S6352254 U JPS6352254 U JP S6352254U
Authority
JP
Japan
Prior art keywords
microwave
discharge box
ions
extracted
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14501586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14501586U priority Critical patent/JPS6352254U/ja
Publication of JPS6352254U publication Critical patent/JPS6352254U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP14501586U 1986-09-24 1986-09-24 Pending JPS6352254U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14501586U JPS6352254U (enExample) 1986-09-24 1986-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14501586U JPS6352254U (enExample) 1986-09-24 1986-09-24

Publications (1)

Publication Number Publication Date
JPS6352254U true JPS6352254U (enExample) 1988-04-08

Family

ID=31056159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14501586U Pending JPS6352254U (enExample) 1986-09-24 1986-09-24

Country Status (1)

Country Link
JP (1) JPS6352254U (enExample)

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