JPS6351824B2 - - Google Patents

Info

Publication number
JPS6351824B2
JPS6351824B2 JP59221357A JP22135784A JPS6351824B2 JP S6351824 B2 JPS6351824 B2 JP S6351824B2 JP 59221357 A JP59221357 A JP 59221357A JP 22135784 A JP22135784 A JP 22135784A JP S6351824 B2 JPS6351824 B2 JP S6351824B2
Authority
JP
Japan
Prior art keywords
polishing pad
polishing
polished
elastic force
force distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59221357A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61100358A (ja
Inventor
Nobuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59221357A priority Critical patent/JPS61100358A/ja
Publication of JPS61100358A publication Critical patent/JPS61100358A/ja
Publication of JPS6351824B2 publication Critical patent/JPS6351824B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
JP59221357A 1984-10-23 1984-10-23 研摩パツド Granted JPS61100358A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59221357A JPS61100358A (ja) 1984-10-23 1984-10-23 研摩パツド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59221357A JPS61100358A (ja) 1984-10-23 1984-10-23 研摩パツド

Publications (2)

Publication Number Publication Date
JPS61100358A JPS61100358A (ja) 1986-05-19
JPS6351824B2 true JPS6351824B2 (enrdf_load_html_response) 1988-10-17

Family

ID=16765525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59221357A Granted JPS61100358A (ja) 1984-10-23 1984-10-23 研摩パツド

Country Status (1)

Country Link
JP (1) JPS61100358A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0347383A (ja) * 1989-07-13 1991-02-28 Honda Lock Mfg Co Ltd 自動車用ドアロック装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61103768A (ja) * 1984-10-25 1986-05-22 Olympus Optical Co Ltd 研摩・研削工具
US6439979B1 (en) 1992-02-12 2002-08-27 Tokyo Electron Limited Polishing apparatus and polishing method using the same
JP3708167B2 (ja) * 1995-05-17 2005-10-19 株式会社荏原製作所 研磨布及び該研磨布を備えたポリッシング装置
DE102004003131A1 (de) 2004-01-15 2005-08-11 Carl Zeiss Vorrichtung und Verfahren zum Polieren einer optischen Fläche, optisches Bauelement, sowie Verfahren zum Herstellen eines Polierwerkzeugs
JP4933957B2 (ja) * 2007-05-18 2012-05-16 住友ゴム工業株式会社 スポンジたわし

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0347383A (ja) * 1989-07-13 1991-02-28 Honda Lock Mfg Co Ltd 自動車用ドアロック装置

Also Published As

Publication number Publication date
JPS61100358A (ja) 1986-05-19

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