JPS6351344B2 - - Google Patents

Info

Publication number
JPS6351344B2
JPS6351344B2 JP55135888A JP13588880A JPS6351344B2 JP S6351344 B2 JPS6351344 B2 JP S6351344B2 JP 55135888 A JP55135888 A JP 55135888A JP 13588880 A JP13588880 A JP 13588880A JP S6351344 B2 JPS6351344 B2 JP S6351344B2
Authority
JP
Japan
Prior art keywords
tube
electrode
insulating
discharge lamp
glass tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55135888A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5763758A (en
Inventor
Takashi Fujimura
Kyoshi Saruwatari
Yoshifumi Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13588880A priority Critical patent/JPS5763758A/ja
Priority to US06/306,714 priority patent/US4482842A/en
Publication of JPS5763758A publication Critical patent/JPS5763758A/ja
Publication of JPS6351344B2 publication Critical patent/JPS6351344B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/822—High-pressure mercury lamps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
JP13588880A 1980-10-01 1980-10-01 Discharge lamp Granted JPS5763758A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP13588880A JPS5763758A (en) 1980-10-01 1980-10-01 Discharge lamp
US06/306,714 US4482842A (en) 1980-10-01 1981-09-29 Curved tube type ultra high pressure mercury arc discharge lamp device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13588880A JPS5763758A (en) 1980-10-01 1980-10-01 Discharge lamp

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP1232829A Division JPH02119028A (ja) 1989-09-11 1989-09-11 放電灯
JP1232828A Division JPH02119042A (ja) 1989-09-11 1989-09-11 放電灯

Publications (2)

Publication Number Publication Date
JPS5763758A JPS5763758A (en) 1982-04-17
JPS6351344B2 true JPS6351344B2 (enrdf_load_stackoverflow) 1988-10-13

Family

ID=15162132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13588880A Granted JPS5763758A (en) 1980-10-01 1980-10-01 Discharge lamp

Country Status (1)

Country Link
JP (1) JPS5763758A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02119028A (ja) * 1989-09-11 1990-05-07 Hitachi Ltd 放電灯

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4974783U (enrdf_load_stackoverflow) * 1972-10-12 1974-06-28
JPS6351344A (ja) * 1986-08-20 1988-03-04 Daicel Chem Ind Ltd ジアルキレングリコ−ルモノエ−テル類の回収方法

Also Published As

Publication number Publication date
JPS5763758A (en) 1982-04-17

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