JPS6350874U - - Google Patents
Info
- Publication number
- JPS6350874U JPS6350874U JP14571786U JP14571786U JPS6350874U JP S6350874 U JPS6350874 U JP S6350874U JP 14571786 U JP14571786 U JP 14571786U JP 14571786 U JP14571786 U JP 14571786U JP S6350874 U JPS6350874 U JP S6350874U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- ion
- source
- ion beam
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims 6
- 230000008020 evaporation Effects 0.000 claims 6
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14571786U JPS6350874U (cs) | 1986-09-22 | 1986-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14571786U JPS6350874U (cs) | 1986-09-22 | 1986-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6350874U true JPS6350874U (cs) | 1988-04-06 |
Family
ID=31057515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14571786U Pending JPS6350874U (cs) | 1986-09-22 | 1986-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350874U (cs) |
-
1986
- 1986-09-22 JP JP14571786U patent/JPS6350874U/ja active Pending
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