JPS63110565U - - Google Patents
Info
- Publication number
- JPS63110565U JPS63110565U JP90287U JP90287U JPS63110565U JP S63110565 U JPS63110565 U JP S63110565U JP 90287 U JP90287 U JP 90287U JP 90287 U JP90287 U JP 90287U JP S63110565 U JPS63110565 U JP S63110565U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- trine
- pieces
- electron beam
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 7
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims 4
- 230000008020 evaporation Effects 0.000 claims 4
- 238000010894 electron beam technology Methods 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP90287U JPS63110565U (cs) | 1987-01-06 | 1987-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP90287U JPS63110565U (cs) | 1987-01-06 | 1987-01-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110565U true JPS63110565U (cs) | 1988-07-15 |
Family
ID=30778305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP90287U Pending JPS63110565U (cs) | 1987-01-06 | 1987-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110565U (cs) |
-
1987
- 1987-01-06 JP JP90287U patent/JPS63110565U/ja active Pending