JPH0189954U - - Google Patents
Info
- Publication number
- JPH0189954U JPH0189954U JP18463987U JP18463987U JPH0189954U JP H0189954 U JPH0189954 U JP H0189954U JP 18463987 U JP18463987 U JP 18463987U JP 18463987 U JP18463987 U JP 18463987U JP H0189954 U JPH0189954 U JP H0189954U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- electron beam
- annular
- evaporation source
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 11
- 238000001704 evaporation Methods 0.000 claims description 11
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18463987U JPH0189954U (cs) | 1987-12-03 | 1987-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18463987U JPH0189954U (cs) | 1987-12-03 | 1987-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189954U true JPH0189954U (cs) | 1989-06-13 |
Family
ID=31475983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18463987U Pending JPH0189954U (cs) | 1987-12-03 | 1987-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189954U (cs) |
-
1987
- 1987-12-03 JP JP18463987U patent/JPH0189954U/ja active Pending