JPS61164277U - - Google Patents
Info
- Publication number
- JPS61164277U JPS61164277U JP4803985U JP4803985U JPS61164277U JP S61164277 U JPS61164277 U JP S61164277U JP 4803985 U JP4803985 U JP 4803985U JP 4803985 U JP4803985 U JP 4803985U JP S61164277 U JPS61164277 U JP S61164277U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- beam source
- stored
- source material
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000000407 epitaxy Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4803985U JPS61164277U (cs) | 1985-03-30 | 1985-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4803985U JPS61164277U (cs) | 1985-03-30 | 1985-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164277U true JPS61164277U (cs) | 1986-10-11 |
Family
ID=30563914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4803985U Pending JPS61164277U (cs) | 1985-03-30 | 1985-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164277U (cs) |
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1985
- 1985-03-30 JP JP4803985U patent/JPS61164277U/ja active Pending