JPS6346461U - - Google Patents
Info
- Publication number
- JPS6346461U JPS6346461U JP14096386U JP14096386U JPS6346461U JP S6346461 U JPS6346461 U JP S6346461U JP 14096386 U JP14096386 U JP 14096386U JP 14096386 U JP14096386 U JP 14096386U JP S6346461 U JPS6346461 U JP S6346461U
- Authority
- JP
- Japan
- Prior art keywords
- hearth liner
- crucible
- pin
- vacuum evaporation
- hearth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14096386U JPS6346461U (cs) | 1986-09-13 | 1986-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14096386U JPS6346461U (cs) | 1986-09-13 | 1986-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6346461U true JPS6346461U (cs) | 1988-03-29 |
Family
ID=31048311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14096386U Pending JPS6346461U (cs) | 1986-09-13 | 1986-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6346461U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04272088A (ja) * | 1991-02-27 | 1992-09-28 | Nissei Eng:Yugen | 挟持形吊具 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5858277A (ja) * | 1981-10-03 | 1983-04-06 | Matsushita Electric Works Ltd | 蒸着装置 |
| JPS58213874A (ja) * | 1982-06-02 | 1983-12-12 | Matsushita Electric Ind Co Ltd | 電子ビ−ム蒸着用ルツボ |
-
1986
- 1986-09-13 JP JP14096386U patent/JPS6346461U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5858277A (ja) * | 1981-10-03 | 1983-04-06 | Matsushita Electric Works Ltd | 蒸着装置 |
| JPS58213874A (ja) * | 1982-06-02 | 1983-12-12 | Matsushita Electric Ind Co Ltd | 電子ビ−ム蒸着用ルツボ |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04272088A (ja) * | 1991-02-27 | 1992-09-28 | Nissei Eng:Yugen | 挟持形吊具 |