JPS62203264U - - Google Patents
Info
- Publication number
- JPS62203264U JPS62203264U JP9177086U JP9177086U JPS62203264U JP S62203264 U JPS62203264 U JP S62203264U JP 9177086 U JP9177086 U JP 9177086U JP 9177086 U JP9177086 U JP 9177086U JP S62203264 U JPS62203264 U JP S62203264U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- vacuum container
- vacuum
- coil
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000005566 electron beam evaporation Methods 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000005284 excitation Effects 0.000 claims 1
- 239000000696 magnetic material Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9177086U JPS62203264U (cs) | 1986-06-16 | 1986-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9177086U JPS62203264U (cs) | 1986-06-16 | 1986-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62203264U true JPS62203264U (cs) | 1987-12-25 |
Family
ID=30952866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9177086U Pending JPS62203264U (cs) | 1986-06-16 | 1986-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62203264U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6169264A (ja) * | 1984-06-25 | 1986-04-09 | テクトロニツクス・インコ−ポレイテツド | 画像符号化装置 |
-
1986
- 1986-06-16 JP JP9177086U patent/JPS62203264U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6169264A (ja) * | 1984-06-25 | 1986-04-09 | テクトロニツクス・インコ−ポレイテツド | 画像符号化装置 |