JPS6350122U - - Google Patents
Info
- Publication number
- JPS6350122U JPS6350122U JP14482586U JP14482586U JPS6350122U JP S6350122 U JPS6350122 U JP S6350122U JP 14482586 U JP14482586 U JP 14482586U JP 14482586 U JP14482586 U JP 14482586U JP S6350122 U JPS6350122 U JP S6350122U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- vapor deposition
- deposition material
- thin film
- mounting mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims 4
- 238000007740 vapor deposition Methods 0.000 claims 4
- 238000000151 deposition Methods 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14482586U JPS6350122U (cs) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14482586U JPS6350122U (cs) | 1986-09-19 | 1986-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6350122U true JPS6350122U (cs) | 1988-04-05 |
Family
ID=31055790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14482586U Pending JPS6350122U (cs) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350122U (cs) |
-
1986
- 1986-09-19 JP JP14482586U patent/JPS6350122U/ja active Pending
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