JPS6350848Y2 - - Google Patents

Info

Publication number
JPS6350848Y2
JPS6350848Y2 JP1979121499U JP12149979U JPS6350848Y2 JP S6350848 Y2 JPS6350848 Y2 JP S6350848Y2 JP 1979121499 U JP1979121499 U JP 1979121499U JP 12149979 U JP12149979 U JP 12149979U JP S6350848 Y2 JPS6350848 Y2 JP S6350848Y2
Authority
JP
Japan
Prior art keywords
flow rate
supply pipe
mass flow
gas
detection means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979121499U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5638449U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979121499U priority Critical patent/JPS6350848Y2/ja
Publication of JPS5638449U publication Critical patent/JPS5638449U/ja
Application granted granted Critical
Publication of JPS6350848Y2 publication Critical patent/JPS6350848Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1979121499U 1979-09-03 1979-09-03 Expired JPS6350848Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979121499U JPS6350848Y2 (enrdf_load_stackoverflow) 1979-09-03 1979-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979121499U JPS6350848Y2 (enrdf_load_stackoverflow) 1979-09-03 1979-09-03

Publications (2)

Publication Number Publication Date
JPS5638449U JPS5638449U (enrdf_load_stackoverflow) 1981-04-11
JPS6350848Y2 true JPS6350848Y2 (enrdf_load_stackoverflow) 1988-12-27

Family

ID=29353633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979121499U Expired JPS6350848Y2 (enrdf_load_stackoverflow) 1979-09-03 1979-09-03

Country Status (1)

Country Link
JP (1) JPS6350848Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008277666A (ja) * 2007-05-02 2008-11-13 Tokyo Electron Ltd バルブ開閉動作確認方法、ガス処理装置および記憶媒体

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5176976A (ja) * 1974-12-27 1976-07-03 Tokyo Shibaura Electric Co Kisohannosochi
JPS5824759Y2 (ja) * 1978-01-31 1983-05-27 株式会社東芝 流量計の校正装置

Also Published As

Publication number Publication date
JPS5638449U (enrdf_load_stackoverflow) 1981-04-11

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