JPS5176976A - Kisohannosochi - Google Patents
KisohannosochiInfo
- Publication number
- JPS5176976A JPS5176976A JP14856674A JP14856674A JPS5176976A JP S5176976 A JPS5176976 A JP S5176976A JP 14856674 A JP14856674 A JP 14856674A JP 14856674 A JP14856674 A JP 14856674A JP S5176976 A JPS5176976 A JP S5176976A
- Authority
- JP
- Japan
- Prior art keywords
- kisohanno
- sochi
- kisohanno sochi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14856674A JPS5176976A (ja) | 1974-12-27 | 1974-12-27 | Kisohannosochi |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14856674A JPS5176976A (ja) | 1974-12-27 | 1974-12-27 | Kisohannosochi |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5176976A true JPS5176976A (ja) | 1976-07-03 |
JPS541622B2 JPS541622B2 (ja) | 1979-01-26 |
Family
ID=15455601
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14856674A Granted JPS5176976A (ja) | 1974-12-27 | 1974-12-27 | Kisohannosochi |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5176976A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5638449U (ja) * | 1979-09-03 | 1981-04-11 | ||
JPH02125421A (ja) * | 1988-11-04 | 1990-05-14 | Tel Sagami Ltd | 熱処理装置 |
WO1992015116A1 (en) * | 1991-02-20 | 1992-09-03 | Semiconductor Process Laboratory Co., Ltd. | Semiconductor manufacturing equipment |
-
1974
- 1974-12-27 JP JP14856674A patent/JPS5176976A/ja active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5638449U (ja) * | 1979-09-03 | 1981-04-11 | ||
JPS6350848Y2 (ja) * | 1979-09-03 | 1988-12-27 | ||
JPH02125421A (ja) * | 1988-11-04 | 1990-05-14 | Tel Sagami Ltd | 熱処理装置 |
WO1992015116A1 (en) * | 1991-02-20 | 1992-09-03 | Semiconductor Process Laboratory Co., Ltd. | Semiconductor manufacturing equipment |
US5281295A (en) * | 1991-02-20 | 1994-01-25 | Semiconductor Process Laboratory Co., Ltd. | Semiconductor fabrication equipment |
Also Published As
Publication number | Publication date |
---|---|
JPS541622B2 (ja) | 1979-01-26 |
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