JPS5176976A - Kisohannosochi - Google Patents

Kisohannosochi

Info

Publication number
JPS5176976A
JPS5176976A JP14856674A JP14856674A JPS5176976A JP S5176976 A JPS5176976 A JP S5176976A JP 14856674 A JP14856674 A JP 14856674A JP 14856674 A JP14856674 A JP 14856674A JP S5176976 A JPS5176976 A JP S5176976A
Authority
JP
Japan
Prior art keywords
kisohanno
sochi
kisohanno sochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14856674A
Other languages
English (en)
Other versions
JPS541622B2 (ja
Inventor
Toshio Yonezawa
Shoichi Kitane
Shinichi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP14856674A priority Critical patent/JPS5176976A/ja
Publication of JPS5176976A publication Critical patent/JPS5176976A/ja
Publication of JPS541622B2 publication Critical patent/JPS541622B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP14856674A 1974-12-27 1974-12-27 Kisohannosochi Granted JPS5176976A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14856674A JPS5176976A (ja) 1974-12-27 1974-12-27 Kisohannosochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14856674A JPS5176976A (ja) 1974-12-27 1974-12-27 Kisohannosochi

Publications (2)

Publication Number Publication Date
JPS5176976A true JPS5176976A (ja) 1976-07-03
JPS541622B2 JPS541622B2 (ja) 1979-01-26

Family

ID=15455601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14856674A Granted JPS5176976A (ja) 1974-12-27 1974-12-27 Kisohannosochi

Country Status (1)

Country Link
JP (1) JPS5176976A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638449U (ja) * 1979-09-03 1981-04-11
JPH02125421A (ja) * 1988-11-04 1990-05-14 Tel Sagami Ltd 熱処理装置
WO1992015116A1 (en) * 1991-02-20 1992-09-03 Semiconductor Process Laboratory Co., Ltd. Semiconductor manufacturing equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638449U (ja) * 1979-09-03 1981-04-11
JPS6350848Y2 (ja) * 1979-09-03 1988-12-27
JPH02125421A (ja) * 1988-11-04 1990-05-14 Tel Sagami Ltd 熱処理装置
WO1992015116A1 (en) * 1991-02-20 1992-09-03 Semiconductor Process Laboratory Co., Ltd. Semiconductor manufacturing equipment
US5281295A (en) * 1991-02-20 1994-01-25 Semiconductor Process Laboratory Co., Ltd. Semiconductor fabrication equipment

Also Published As

Publication number Publication date
JPS541622B2 (ja) 1979-01-26

Similar Documents

Publication Publication Date Title
JPS51109399A (ja) Sokosuruchojakuseniseihinonetsushorisuruhohoto sochi
JPS5111033A (ja) Renzokutasoseikyokaisengasushiirudoyosetsuhooyobisono sochi
JPS5110478A (ja) Shitsushikishujinkiniokeru shujinekino funmuhoho narabini sochi
JPS5125715A (ja) Teidenatsukoryuhatsudensochi
JPS5110614A (ja) Shichuniudekanokeishisuru sochi
JPS511130A (ja) Kakikomishokyogaokonaeru fukushasochi
JPS5111155A (ja) Anteikadengensochi
JPS5110053A (ja) Shuyakusaibaisochi
JPS5110430A (ja) Nenshoseigyosochi
JPS5144260A (ja) Kaitenjikurotsukusochi
JPS5119410A (ja) Jidodaiyarusochi
JPS5111451A (ja) Kanetsujuchakusochi
JPS5110950A (ja) Hikarihenkosochi
JPS5110555A (ja) Ojokozaitsuriagesochi
JPS515516A (ja) Kaijiseigyosochi
JPS5110390A (ja) Tsushinkeeburuyososenno katsudoyoriawasehohooyobisono sochi
JPS5110256A (ja) Mekanikarurotsukusochi
JPS5110178A (ja) Kiekisetsushokuhannosochi
JPS511095A (ja) Ondokanshiseigyosochi
JPS5110799A (ja) Jidotsuhosochi
JPS5110091A (ja) Suibotsuamiichikakuninhohooyobi sochi
JPS5111421A (ja) Kaatoritsujishikirokuonsochi
JPS5111420A (ja) Kaatoritsujishikirokuonsochi
JPS5117765A (ja) Roopudomesochi
JPS5111228A (ja) Nenshosochi