JPS634933B2 - - Google Patents

Info

Publication number
JPS634933B2
JPS634933B2 JP57123910A JP12391082A JPS634933B2 JP S634933 B2 JPS634933 B2 JP S634933B2 JP 57123910 A JP57123910 A JP 57123910A JP 12391082 A JP12391082 A JP 12391082A JP S634933 B2 JPS634933 B2 JP S634933B2
Authority
JP
Japan
Prior art keywords
mark
signal
value
detected
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57123910A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5914636A (ja
Inventor
Tetsuo Yuasa
Yasuyuki Kosaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP12391082A priority Critical patent/JPS5914636A/ja
Publication of JPS5914636A publication Critical patent/JPS5914636A/ja
Publication of JPS634933B2 publication Critical patent/JPS634933B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP12391082A 1982-07-16 1982-07-16 マ−ク検出装置 Granted JPS5914636A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12391082A JPS5914636A (ja) 1982-07-16 1982-07-16 マ−ク検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12391082A JPS5914636A (ja) 1982-07-16 1982-07-16 マ−ク検出装置

Publications (2)

Publication Number Publication Date
JPS5914636A JPS5914636A (ja) 1984-01-25
JPS634933B2 true JPS634933B2 (cs) 1988-02-01

Family

ID=14872365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12391082A Granted JPS5914636A (ja) 1982-07-16 1982-07-16 マ−ク検出装置

Country Status (1)

Country Link
JP (1) JPS5914636A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116007558B (zh) * 2022-12-30 2025-08-26 深圳市磐锋精密技术有限公司 电子产品的内部灰尘检测处理方法、装置和计算机设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5127917A (en) * 1974-09-02 1976-03-09 Matsushita Electric Industrial Co Ltd Supiika
JPS5615040A (en) * 1979-07-17 1981-02-13 Nippon Telegr & Teleph Corp <Ntt> Mark detector
JPS5690204A (en) * 1979-12-24 1981-07-22 Fujitsu Ltd Pattern check device
JPS56149687A (en) * 1980-04-22 1981-11-19 Tokyo Shibaura Electric Co Printed end detector

Also Published As

Publication number Publication date
JPS5914636A (ja) 1984-01-25

Similar Documents

Publication Publication Date Title
KR940011179B1 (ko) 반도체 단결정봉의 절단장치
JPH0646550B2 (ja) 電子ビ−ム定位置照射制御方法および電子ビ−ム定位置照射制御装置
US4336597A (en) Method and system for measuring the diameter of an electron beam
JPS6037907B2 (ja) 距離測定方法
JPH0220921B2 (cs)
JP2004516456A (ja) 見えないエッジの検出システム及び方法
US5434422A (en) Sample position controller in focused ion beam system
JP3265724B2 (ja) 荷電粒子線装置
US4751384A (en) Electron beam metrology system
JPS634933B2 (cs)
JPH043829B2 (cs)
US4704558A (en) Method and apparatus for automatic oscilloscope calibration
JP3430788B2 (ja) 試料像測定装置
JPH04105010A (ja) 形状寸法測定装置および測定方法
JPH09293477A (ja) 荷電ビームの調整方法
JPH03181809A (ja) 外観形状評価装置
JPS6327641B2 (cs)
JP3884820B2 (ja) サブミクロンの特定の物体の位置を突き止めるための方法および装置
JP3085341B2 (ja) 外形測定装置及びその被測定物配置方法
JPS63187627A (ja) 荷電粒子線露光装置における自動焦点合せ方法
JPH0430489Y2 (cs)
JPH02126108A (ja) 電子ビーム測長装置
JPS594298Y2 (ja) 走査電子顕微鏡等の試料装置
JPH0332736B2 (cs)
JPH0674742A (ja) 電子ビーム寸法測定装置