JPS6349233U - - Google Patents

Info

Publication number
JPS6349233U
JPS6349233U JP1987075179U JP7517987U JPS6349233U JP S6349233 U JPS6349233 U JP S6349233U JP 1987075179 U JP1987075179 U JP 1987075179U JP 7517987 U JP7517987 U JP 7517987U JP S6349233 U JPS6349233 U JP S6349233U
Authority
JP
Japan
Prior art keywords
drawer
opening end
wafer
semiconductor manufacturing
manufacturing process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987075179U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987075179U priority Critical patent/JPS6349233U/ja
Publication of JPS6349233U publication Critical patent/JPS6349233U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Charging Or Discharging (AREA)
JP1987075179U 1987-05-21 1987-05-21 Pending JPS6349233U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987075179U JPS6349233U (enExample) 1987-05-21 1987-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987075179U JPS6349233U (enExample) 1987-05-21 1987-05-21

Publications (1)

Publication Number Publication Date
JPS6349233U true JPS6349233U (enExample) 1988-04-04

Family

ID=30921083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987075179U Pending JPS6349233U (enExample) 1987-05-21 1987-05-21

Country Status (1)

Country Link
JP (1) JPS6349233U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51120913A (en) * 1975-04-16 1976-10-22 Daido Steel Co Ltd Air-jet-out type cooling device for running strip
JPS5478970A (en) * 1977-12-07 1979-06-23 Oki Electric Ind Co Ltd Diffusion method for impurity

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51120913A (en) * 1975-04-16 1976-10-22 Daido Steel Co Ltd Air-jet-out type cooling device for running strip
JPS5478970A (en) * 1977-12-07 1979-06-23 Oki Electric Ind Co Ltd Diffusion method for impurity

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