JPH01173930U - - Google Patents
Info
- Publication number
- JPH01173930U JPH01173930U JP6898188U JP6898188U JPH01173930U JP H01173930 U JPH01173930 U JP H01173930U JP 6898188 U JP6898188 U JP 6898188U JP 6898188 U JP6898188 U JP 6898188U JP H01173930 U JPH01173930 U JP H01173930U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- furnace
- wafer heat
- furnace body
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000010926 purge Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6898188U JPH01173930U (enExample) | 1988-05-25 | 1988-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6898188U JPH01173930U (enExample) | 1988-05-25 | 1988-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01173930U true JPH01173930U (enExample) | 1989-12-11 |
Family
ID=31294273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6898188U Pending JPH01173930U (enExample) | 1988-05-25 | 1988-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01173930U (enExample) |
-
1988
- 1988-05-25 JP JP6898188U patent/JPH01173930U/ja active Pending