JPH02122432U - - Google Patents
Info
- Publication number
- JPH02122432U JPH02122432U JP3228289U JP3228289U JPH02122432U JP H02122432 U JPH02122432 U JP H02122432U JP 3228289 U JP3228289 U JP 3228289U JP 3228289 U JP3228289 U JP 3228289U JP H02122432 U JPH02122432 U JP H02122432U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- wafer
- boat
- holds
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 5
- 230000003647 oxidation Effects 0.000 claims 2
- 238000007254 oxidation reaction Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3228289U JPH02122432U (enExample) | 1989-03-22 | 1989-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3228289U JPH02122432U (enExample) | 1989-03-22 | 1989-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02122432U true JPH02122432U (enExample) | 1990-10-08 |
Family
ID=31258677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3228289U Pending JPH02122432U (enExample) | 1989-03-22 | 1989-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02122432U (enExample) |
-
1989
- 1989-03-22 JP JP3228289U patent/JPH02122432U/ja active Pending