JPS6441130U - - Google Patents
Info
- Publication number
- JPS6441130U JPS6441130U JP1987137060U JP13706087U JPS6441130U JP S6441130 U JPS6441130 U JP S6441130U JP 1987137060 U JP1987137060 U JP 1987137060U JP 13706087 U JP13706087 U JP 13706087U JP S6441130 U JPS6441130 U JP S6441130U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- dummy
- dummy wafer
- transfer device
- adjacent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987137060U JPS6441130U (enExample) | 1987-09-08 | 1987-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987137060U JPS6441130U (enExample) | 1987-09-08 | 1987-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6441130U true JPS6441130U (enExample) | 1989-03-13 |
Family
ID=31398144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987137060U Pending JPS6441130U (enExample) | 1987-09-08 | 1987-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6441130U (enExample) |
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1987
- 1987-09-08 JP JP1987137060U patent/JPS6441130U/ja active Pending