JPH0296727U - - Google Patents
Info
- Publication number
- JPH0296727U JPH0296727U JP597589U JP597589U JPH0296727U JP H0296727 U JPH0296727 U JP H0296727U JP 597589 U JP597589 U JP 597589U JP 597589 U JP597589 U JP 597589U JP H0296727 U JPH0296727 U JP H0296727U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- tube
- heat treatment
- semiconductor devices
- upright
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP597589U JPH0296727U (enExample) | 1989-01-20 | 1989-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP597589U JPH0296727U (enExample) | 1989-01-20 | 1989-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0296727U true JPH0296727U (enExample) | 1990-08-01 |
Family
ID=31209817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP597589U Pending JPH0296727U (enExample) | 1989-01-20 | 1989-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0296727U (enExample) |
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1989
- 1989-01-20 JP JP597589U patent/JPH0296727U/ja active Pending