JPH01173931U - - Google Patents
Info
- Publication number
- JPH01173931U JPH01173931U JP1988068986U JP6898688U JPH01173931U JP H01173931 U JPH01173931 U JP H01173931U JP 1988068986 U JP1988068986 U JP 1988068986U JP 6898688 U JP6898688 U JP 6898688U JP H01173931 U JPH01173931 U JP H01173931U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- semiconductor wafer
- coating device
- resist coating
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988068986U JPH01173931U (enExample) | 1988-05-25 | 1988-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988068986U JPH01173931U (enExample) | 1988-05-25 | 1988-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01173931U true JPH01173931U (enExample) | 1989-12-11 |
Family
ID=31294278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988068986U Pending JPH01173931U (enExample) | 1988-05-25 | 1988-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01173931U (enExample) |
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1988
- 1988-05-25 JP JP1988068986U patent/JPH01173931U/ja active Pending