JPS63131125U - - Google Patents
Info
- Publication number
- JPS63131125U JPS63131125U JP1987023160U JP2316087U JPS63131125U JP S63131125 U JPS63131125 U JP S63131125U JP 1987023160 U JP1987023160 U JP 1987023160U JP 2316087 U JP2316087 U JP 2316087U JP S63131125 U JPS63131125 U JP S63131125U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- furnace tube
- quartz
- diffusion furnace
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987023160U JPS63131125U (enExample) | 1987-02-18 | 1987-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987023160U JPS63131125U (enExample) | 1987-02-18 | 1987-02-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63131125U true JPS63131125U (enExample) | 1988-08-26 |
Family
ID=30821204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987023160U Pending JPS63131125U (enExample) | 1987-02-18 | 1987-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63131125U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003031515A (ja) * | 2001-07-12 | 2003-01-31 | Hitachi Kokusai Electric Inc | 基板処理装置および半導体装置の製造方法 |
-
1987
- 1987-02-18 JP JP1987023160U patent/JPS63131125U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003031515A (ja) * | 2001-07-12 | 2003-01-31 | Hitachi Kokusai Electric Inc | 基板処理装置および半導体装置の製造方法 |