JPS6395234U - - Google Patents
Info
- Publication number
- JPS6395234U JPS6395234U JP19068386U JP19068386U JPS6395234U JP S6395234 U JPS6395234 U JP S6395234U JP 19068386 U JP19068386 U JP 19068386U JP 19068386 U JP19068386 U JP 19068386U JP S6395234 U JPS6395234 U JP S6395234U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- boat
- core tube
- cap means
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19068386U JPS6395234U (enExample) | 1986-12-12 | 1986-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19068386U JPS6395234U (enExample) | 1986-12-12 | 1986-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6395234U true JPS6395234U (enExample) | 1988-06-20 |
Family
ID=31144134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19068386U Pending JPS6395234U (enExample) | 1986-12-12 | 1986-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6395234U (enExample) |
-
1986
- 1986-12-12 JP JP19068386U patent/JPS6395234U/ja active Pending