JPH0178022U - - Google Patents
Info
- Publication number
- JPH0178022U JPH0178022U JP1987172074U JP17207487U JPH0178022U JP H0178022 U JPH0178022 U JP H0178022U JP 1987172074 U JP1987172074 U JP 1987172074U JP 17207487 U JP17207487 U JP 17207487U JP H0178022 U JPH0178022 U JP H0178022U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- quartz tube
- tray
- isolates
- outside air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172074U JPH0178022U (enExample) | 1987-11-12 | 1987-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172074U JPH0178022U (enExample) | 1987-11-12 | 1987-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0178022U true JPH0178022U (enExample) | 1989-05-25 |
Family
ID=31464065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987172074U Pending JPH0178022U (enExample) | 1987-11-12 | 1987-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0178022U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54159170A (en) * | 1978-06-07 | 1979-12-15 | Hitachi Ltd | Tool for wafer processing |
| JPS5731132B2 (enExample) * | 1981-06-19 | 1982-07-02 |
-
1987
- 1987-11-12 JP JP1987172074U patent/JPH0178022U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54159170A (en) * | 1978-06-07 | 1979-12-15 | Hitachi Ltd | Tool for wafer processing |
| JPS5731132B2 (enExample) * | 1981-06-19 | 1982-07-02 |