JPS61114830U - - Google Patents
Info
- Publication number
- JPS61114830U JPS61114830U JP19974684U JP19974684U JPS61114830U JP S61114830 U JPS61114830 U JP S61114830U JP 19974684 U JP19974684 U JP 19974684U JP 19974684 U JP19974684 U JP 19974684U JP S61114830 U JPS61114830 U JP S61114830U
- Authority
- JP
- Japan
- Prior art keywords
- support shaft
- lid
- boat
- hole
- processing tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19974684U JPS61114830U (enExample) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19974684U JPS61114830U (enExample) | 1984-12-28 | 1984-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61114830U true JPS61114830U (enExample) | 1986-07-19 |
Family
ID=30759951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19974684U Pending JPS61114830U (enExample) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61114830U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840258A (enExample) * | 1971-09-23 | 1973-06-13 |
-
1984
- 1984-12-28 JP JP19974684U patent/JPS61114830U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840258A (enExample) * | 1971-09-23 | 1973-06-13 |