JPS61114830U - - Google Patents
Info
- Publication number
- JPS61114830U JPS61114830U JP19974684U JP19974684U JPS61114830U JP S61114830 U JPS61114830 U JP S61114830U JP 19974684 U JP19974684 U JP 19974684U JP 19974684 U JP19974684 U JP 19974684U JP S61114830 U JPS61114830 U JP S61114830U
- Authority
- JP
- Japan
- Prior art keywords
- support shaft
- lid
- boat
- hole
- processing tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Description
第１図は本考案の一実施例による縦型拡散炉の
要部拡大縦断面図である。第２図は従来の縦型拡
散炉の概略縦断面図である。
なお図面に用いられた符号において、１……処
理管、５……シリコンウエハ、６……ウエハボー
ト、２０……上蓋、２９……回転軸、３０……小
径部、３２……テーパ部、である。
FIG. 1 is an enlarged longitudinal sectional view of the main parts of a vertical diffusion furnace according to an embodiment of the present invention. FIG. 2 is a schematic longitudinal sectional view of a conventional vertical diffusion furnace. In addition, in the symbols used in the drawings, 1...processing tube, 5...silicon wafer, 6...wafer boat, 20...upper lid, 29...rotating shaft, 30...small diameter part, 32...tapered part, It is.
Claims (1)
された処理管と、半導体物品を積載するボートと
、このボートを上記処理管の内部の所定位置に吊
持するための支持軸と、この支持軸を挿通する為
の円形の貫通孔を有する蓋体とを夫々具備した半
導体物品の縦型熱処理装置において、上記支持軸
が、上記蓋体の上記貫通孔の内径よりも小さな外
径を有する円柱状の小径部と、この小径部の下部
に設けられ且つ下方に向かつてその径が漸次増大
するようなテーパ部とを夫々具備しており、上記
テーパ部によつて上記蓋体が上記支持軸に対して
心合せされるように構成したことを特徴とする装
置。 a processing tube arranged such that its longitudinal axis extends substantially vertically; a boat for loading semiconductor articles; a support shaft for suspending the boat at a predetermined position inside the processing tube; In a vertical heat treatment apparatus for semiconductor articles, each of which includes a lid having a circular through hole for inserting the support shaft, the support shaft has an outer diameter smaller than an inner diameter of the through hole of the lid. a cylindrical small diameter part, and a tapered part provided at the lower part of the small diameter part, the diameter of which gradually increases toward the bottom, and the tapered part allows the lid to A device characterized in that it is configured to be centered with respect to a support shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19974684U JPS61114830U (en) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19974684U JPS61114830U (en) | 1984-12-28 | 1984-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61114830U true JPS61114830U (en) | 1986-07-19 |
Family
ID=30759951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19974684U Pending JPS61114830U (en) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61114830U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840258A (en) * | 1971-09-23 | 1973-06-13 |
-
1984
- 1984-12-28 JP JP19974684U patent/JPS61114830U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840258A (en) * | 1971-09-23 | 1973-06-13 |
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