JPS62186421U - - Google Patents
Info
- Publication number
- JPS62186421U JPS62186421U JP1986075456U JP7545686U JPS62186421U JP S62186421 U JPS62186421 U JP S62186421U JP 1986075456 U JP1986075456 U JP 1986075456U JP 7545686 U JP7545686 U JP 7545686U JP S62186421 U JPS62186421 U JP S62186421U
- Authority
- JP
- Japan
- Prior art keywords
- inner tube
- boat
- loaded
- wafers
- lifting flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986075456U JPS62186421U (enExample) | 1986-05-19 | 1986-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986075456U JPS62186421U (enExample) | 1986-05-19 | 1986-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186421U true JPS62186421U (enExample) | 1987-11-27 |
Family
ID=30921612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986075456U Pending JPS62186421U (enExample) | 1986-05-19 | 1986-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186421U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01194415A (ja) * | 1988-01-29 | 1989-08-04 | Kokusai Electric Co Ltd | 縦形炉 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62128524A (ja) * | 1985-11-29 | 1987-06-10 | Deisuko Saiyaa Japan:Kk | 多重構造の反応管を持つ縦型半導体熱処理装置 |
-
1986
- 1986-05-19 JP JP1986075456U patent/JPS62186421U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62128524A (ja) * | 1985-11-29 | 1987-06-10 | Deisuko Saiyaa Japan:Kk | 多重構造の反応管を持つ縦型半導体熱処理装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01194415A (ja) * | 1988-01-29 | 1989-08-04 | Kokusai Electric Co Ltd | 縦形炉 |