JPS61144638U - - Google Patents
Info
- Publication number
- JPS61144638U JPS61144638U JP2732885U JP2732885U JPS61144638U JP S61144638 U JPS61144638 U JP S61144638U JP 2732885 U JP2732885 U JP 2732885U JP 2732885 U JP2732885 U JP 2732885U JP S61144638 U JPS61144638 U JP S61144638U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- quartz tubes
- heater
- end side
- heating furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2732885U JPS61144638U (enExample) | 1985-02-28 | 1985-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2732885U JPS61144638U (enExample) | 1985-02-28 | 1985-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61144638U true JPS61144638U (enExample) | 1986-09-06 |
Family
ID=30524179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2732885U Pending JPS61144638U (enExample) | 1985-02-28 | 1985-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61144638U (enExample) |
-
1985
- 1985-02-28 JP JP2732885U patent/JPS61144638U/ja active Pending