JPS6348127Y2 - - Google Patents

Info

Publication number
JPS6348127Y2
JPS6348127Y2 JP1982100311U JP10031182U JPS6348127Y2 JP S6348127 Y2 JPS6348127 Y2 JP S6348127Y2 JP 1982100311 U JP1982100311 U JP 1982100311U JP 10031182 U JP10031182 U JP 10031182U JP S6348127 Y2 JPS6348127 Y2 JP S6348127Y2
Authority
JP
Japan
Prior art keywords
thin film
substrate
film substrate
semiconductor layer
film semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982100311U
Other languages
English (en)
Japanese (ja)
Other versions
JPS594654U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10031182U priority Critical patent/JPS594654U/ja
Publication of JPS594654U publication Critical patent/JPS594654U/ja
Application granted granted Critical
Publication of JPS6348127Y2 publication Critical patent/JPS6348127Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
JP10031182U 1982-07-01 1982-07-01 薄膜半導体装置の製造装置 Granted JPS594654U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10031182U JPS594654U (ja) 1982-07-01 1982-07-01 薄膜半導体装置の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10031182U JPS594654U (ja) 1982-07-01 1982-07-01 薄膜半導体装置の製造装置

Publications (2)

Publication Number Publication Date
JPS594654U JPS594654U (ja) 1984-01-12
JPS6348127Y2 true JPS6348127Y2 (enrdf_load_stackoverflow) 1988-12-12

Family

ID=30237349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10031182U Granted JPS594654U (ja) 1982-07-01 1982-07-01 薄膜半導体装置の製造装置

Country Status (1)

Country Link
JP (1) JPS594654U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991190A (enrdf_load_stackoverflow) * 1972-12-29 1974-08-30

Also Published As

Publication number Publication date
JPS594654U (ja) 1984-01-12

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