JPS6345597Y2 - - Google Patents
Info
- Publication number
- JPS6345597Y2 JPS6345597Y2 JP4722084U JP4722084U JPS6345597Y2 JP S6345597 Y2 JPS6345597 Y2 JP S6345597Y2 JP 4722084 U JP4722084 U JP 4722084U JP 4722084 U JP4722084 U JP 4722084U JP S6345597 Y2 JPS6345597 Y2 JP S6345597Y2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- port
- machine room
- switching valve
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010926 purge Methods 0.000 claims description 9
- 230000009972 noncorrosive effect Effects 0.000 claims description 6
- 239000003921 oil Substances 0.000 description 12
- 238000012423 maintenance Methods 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 239000010687 lubricating oil Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4722084U JPS60157994U (ja) | 1984-03-30 | 1984-03-30 | タ−ボ分子ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4722084U JPS60157994U (ja) | 1984-03-30 | 1984-03-30 | タ−ボ分子ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60157994U JPS60157994U (ja) | 1985-10-21 |
| JPS6345597Y2 true JPS6345597Y2 (US07709020-20100504-C00041.png) | 1988-11-25 |
Family
ID=30562350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4722084U Granted JPS60157994U (ja) | 1984-03-30 | 1984-03-30 | タ−ボ分子ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60157994U (US07709020-20100504-C00041.png) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06630Y2 (ja) * | 1985-12-20 | 1994-01-05 | 株式会社島津製作所 | タ−ボ分子ポンプ |
| EP2784796A1 (en) | 2013-03-25 | 2014-10-01 | ABB Technology AG | Gas cooler for a medium voltage switchgear assembly |
| EP3628883B1 (de) * | 2019-12-09 | 2022-02-09 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
-
1984
- 1984-03-30 JP JP4722084U patent/JPS60157994U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60157994U (ja) | 1985-10-21 |
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