JPS6345049B2 - - Google Patents

Info

Publication number
JPS6345049B2
JPS6345049B2 JP54167467A JP16746779A JPS6345049B2 JP S6345049 B2 JPS6345049 B2 JP S6345049B2 JP 54167467 A JP54167467 A JP 54167467A JP 16746779 A JP16746779 A JP 16746779A JP S6345049 B2 JPS6345049 B2 JP S6345049B2
Authority
JP
Japan
Prior art keywords
vacuum
substrate
cavity
saw
sleeve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54167467A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5598323A (en
Inventor
Edowaado Karen Donarudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of JPS5598323A publication Critical patent/JPS5598323A/ja
Publication of JPS6345049B2 publication Critical patent/JPS6345049B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP16746779A 1978-12-22 1979-12-21 Vacuummsealed structure for saw pressure sensor Granted JPS5598323A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US97254278A 1978-12-22 1978-12-22

Publications (2)

Publication Number Publication Date
JPS5598323A JPS5598323A (en) 1980-07-26
JPS6345049B2 true JPS6345049B2 (enrdf_load_stackoverflow) 1988-09-07

Family

ID=25519783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16746779A Granted JPS5598323A (en) 1978-12-22 1979-12-21 Vacuummsealed structure for saw pressure sensor

Country Status (8)

Country Link
JP (1) JPS5598323A (enrdf_load_stackoverflow)
AU (1) AU524762B2 (enrdf_load_stackoverflow)
CA (1) CA1126975A (enrdf_load_stackoverflow)
DE (1) DE2951469A1 (enrdf_load_stackoverflow)
FR (1) FR2444936A1 (enrdf_load_stackoverflow)
GB (1) GB2037988B (enrdf_load_stackoverflow)
IT (1) IT1125925B (enrdf_load_stackoverflow)
SE (1) SE7910311L (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008070241A (ja) * 2006-09-14 2008-03-27 Epson Toyocom Corp 圧力センサ、及びその製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0329019D0 (en) * 2003-12-15 2004-01-14 Imp College Innovations Ltd Acoustic wave devices
USD512637S1 (en) * 2004-04-12 2005-12-13 The Procter & Gamble Company Bottle

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697917A (en) * 1971-08-02 1972-10-10 Gen Electric Semiconductor strain gage pressure transducer
GB1389610A (en) * 1972-10-11 1975-04-03 Marconi Co Ltd Surfacewave devices
JPS52149992A (en) * 1976-06-09 1977-12-13 Hitachi Ltd Pressure transducer
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer
US4100811A (en) * 1977-03-18 1978-07-18 United Technologies Corporation Differential surface acoustic wave transducer
US4216401A (en) * 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008070241A (ja) * 2006-09-14 2008-03-27 Epson Toyocom Corp 圧力センサ、及びその製造方法

Also Published As

Publication number Publication date
FR2444936A1 (fr) 1980-07-18
GB2037988B (en) 1983-03-02
GB2037988A (en) 1980-07-16
JPS5598323A (en) 1980-07-26
SE7910311L (sv) 1980-06-23
IT1125925B (it) 1986-05-14
FR2444936B1 (enrdf_load_stackoverflow) 1982-10-08
CA1126975A (en) 1982-07-06
IT7928110A0 (it) 1979-12-18
DE2951469A1 (de) 1980-07-03
AU524762B2 (en) 1982-09-30
AU5379779A (en) 1980-06-26

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