IT1125925B - Struttura di incapsulamento sotto vuoto per sensori di pressione ad onda acustica superficiale - Google Patents

Struttura di incapsulamento sotto vuoto per sensori di pressione ad onda acustica superficiale

Info

Publication number
IT1125925B
IT1125925B IT28110/79A IT2811079A IT1125925B IT 1125925 B IT1125925 B IT 1125925B IT 28110/79 A IT28110/79 A IT 28110/79A IT 2811079 A IT2811079 A IT 2811079A IT 1125925 B IT1125925 B IT 1125925B
Authority
IT
Italy
Prior art keywords
sound wave
pressure sensors
packaging structure
vacuum packaging
wave pressure
Prior art date
Application number
IT28110/79A
Other languages
English (en)
Other versions
IT7928110A0 (it
Inventor
Donald Edward Cullen
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of IT7928110A0 publication Critical patent/IT7928110A0/it
Application granted granted Critical
Publication of IT1125925B publication Critical patent/IT1125925B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
IT28110/79A 1978-12-22 1979-12-18 Struttura di incapsulamento sotto vuoto per sensori di pressione ad onda acustica superficiale IT1125925B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US97254278A 1978-12-22 1978-12-22

Publications (2)

Publication Number Publication Date
IT7928110A0 IT7928110A0 (it) 1979-12-18
IT1125925B true IT1125925B (it) 1986-05-14

Family

ID=25519783

Family Applications (1)

Application Number Title Priority Date Filing Date
IT28110/79A IT1125925B (it) 1978-12-22 1979-12-18 Struttura di incapsulamento sotto vuoto per sensori di pressione ad onda acustica superficiale

Country Status (8)

Country Link
JP (1) JPS5598323A (it)
AU (1) AU524762B2 (it)
CA (1) CA1126975A (it)
DE (1) DE2951469A1 (it)
FR (1) FR2444936A1 (it)
GB (1) GB2037988B (it)
IT (1) IT1125925B (it)
SE (1) SE7910311L (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0329019D0 (en) * 2003-12-15 2004-01-14 Imp College Innovations Ltd Acoustic wave devices
JP4983176B2 (ja) * 2006-09-14 2012-07-25 セイコーエプソン株式会社 圧力センサの製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697917A (en) * 1971-08-02 1972-10-10 Gen Electric Semiconductor strain gage pressure transducer
GB1389610A (en) * 1972-10-11 1975-04-03 Marconi Co Ltd Surfacewave devices
JPS52149992A (en) * 1976-06-09 1977-12-13 Hitachi Ltd Pressure transducer
JPS5365089A (en) * 1976-11-24 1978-06-10 Toshiba Corp Semiconductor pressure transducer
US4100811A (en) * 1977-03-18 1978-07-18 United Technologies Corporation Differential surface acoustic wave transducer
US4216401A (en) * 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure

Also Published As

Publication number Publication date
FR2444936A1 (fr) 1980-07-18
DE2951469A1 (de) 1980-07-03
CA1126975A (en) 1982-07-06
FR2444936B1 (it) 1982-10-08
IT7928110A0 (it) 1979-12-18
GB2037988A (en) 1980-07-16
JPS5598323A (en) 1980-07-26
AU524762B2 (en) 1982-09-30
AU5379779A (en) 1980-06-26
GB2037988B (en) 1983-03-02
SE7910311L (sv) 1980-06-23
JPS6345049B2 (it) 1988-09-07

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