JPS634483Y2 - - Google Patents

Info

Publication number
JPS634483Y2
JPS634483Y2 JP12428783U JP12428783U JPS634483Y2 JP S634483 Y2 JPS634483 Y2 JP S634483Y2 JP 12428783 U JP12428783 U JP 12428783U JP 12428783 U JP12428783 U JP 12428783U JP S634483 Y2 JPS634483 Y2 JP S634483Y2
Authority
JP
Japan
Prior art keywords
solvent
gas
processing chamber
nitrogen gas
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12428783U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6031301U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12428783U priority Critical patent/JPS6031301U/ja
Publication of JPS6031301U publication Critical patent/JPS6031301U/ja
Application granted granted Critical
Publication of JPS634483Y2 publication Critical patent/JPS634483Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP12428783U 1983-08-09 1983-08-09 溶剤回収装置 Granted JPS6031301U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12428783U JPS6031301U (ja) 1983-08-09 1983-08-09 溶剤回収装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12428783U JPS6031301U (ja) 1983-08-09 1983-08-09 溶剤回収装置

Publications (2)

Publication Number Publication Date
JPS6031301U JPS6031301U (ja) 1985-03-02
JPS634483Y2 true JPS634483Y2 (enExample) 1988-02-05

Family

ID=30283382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12428783U Granted JPS6031301U (ja) 1983-08-09 1983-08-09 溶剤回収装置

Country Status (1)

Country Link
JP (1) JPS6031301U (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8964361B2 (en) 2010-07-21 2015-02-24 Teradyne, Inc. Bulk transfer of storage devices using manual loading
US9001456B2 (en) 2010-08-31 2015-04-07 Teradyne, Inc. Engaging test slots
US9459312B2 (en) 2013-04-10 2016-10-04 Teradyne, Inc. Electronic assembly test system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0759282B2 (ja) * 1990-08-22 1995-06-28 ジャパン・フィールド株式会社 可燃性溶剤の蒸留方法および装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8964361B2 (en) 2010-07-21 2015-02-24 Teradyne, Inc. Bulk transfer of storage devices using manual loading
US9001456B2 (en) 2010-08-31 2015-04-07 Teradyne, Inc. Engaging test slots
US9459312B2 (en) 2013-04-10 2016-10-04 Teradyne, Inc. Electronic assembly test system

Also Published As

Publication number Publication date
JPS6031301U (ja) 1985-03-02

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