JPS6031301U - 溶剤回収装置 - Google Patents

溶剤回収装置

Info

Publication number
JPS6031301U
JPS6031301U JP12428783U JP12428783U JPS6031301U JP S6031301 U JPS6031301 U JP S6031301U JP 12428783 U JP12428783 U JP 12428783U JP 12428783 U JP12428783 U JP 12428783U JP S6031301 U JPS6031301 U JP S6031301U
Authority
JP
Japan
Prior art keywords
gas
solvent
processing chamber
solvent recovery
separation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12428783U
Other languages
English (en)
Japanese (ja)
Other versions
JPS634483Y2 (enExample
Inventor
能宗　清人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwatani Corp
Original Assignee
Iwatani Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwatani Corp filed Critical Iwatani Corp
Priority to JP12428783U priority Critical patent/JPS6031301U/ja
Publication of JPS6031301U publication Critical patent/JPS6031301U/ja
Application granted granted Critical
Publication of JPS634483Y2 publication Critical patent/JPS634483Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP12428783U 1983-08-09 1983-08-09 溶剤回収装置 Granted JPS6031301U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12428783U JPS6031301U (ja) 1983-08-09 1983-08-09 溶剤回収装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12428783U JPS6031301U (ja) 1983-08-09 1983-08-09 溶剤回収装置

Publications (2)

Publication Number Publication Date
JPS6031301U true JPS6031301U (ja) 1985-03-02
JPS634483Y2 JPS634483Y2 (enExample) 1988-02-05

Family

ID=30283382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12428783U Granted JPS6031301U (ja) 1983-08-09 1983-08-09 溶剤回収装置

Country Status (1)

Country Link
JP (1) JPS6031301U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04104802A (ja) * 1990-08-22 1992-04-07 Japan Field Kk 可燃性溶剤の蒸留方法および装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8687349B2 (en) 2010-07-21 2014-04-01 Teradyne, Inc. Bulk transfer of storage devices using manual loading
US9001456B2 (en) 2010-08-31 2015-04-07 Teradyne, Inc. Engaging test slots
US9459312B2 (en) 2013-04-10 2016-10-04 Teradyne, Inc. Electronic assembly test system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04104802A (ja) * 1990-08-22 1992-04-07 Japan Field Kk 可燃性溶剤の蒸留方法および装置

Also Published As

Publication number Publication date
JPS634483Y2 (enExample) 1988-02-05

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