JPS6344295B2 - - Google Patents
Info
- Publication number
- JPS6344295B2 JPS6344295B2 JP56102914A JP10291481A JPS6344295B2 JP S6344295 B2 JPS6344295 B2 JP S6344295B2 JP 56102914 A JP56102914 A JP 56102914A JP 10291481 A JP10291481 A JP 10291481A JP S6344295 B2 JPS6344295 B2 JP S6344295B2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- semiconductor device
- measuring
- measuring element
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 26
- 239000010408 film Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 7
- 238000012360 testing method Methods 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 description 7
- 238000010998 test method Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 239000012212 insulator Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000006378 damage Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56102914A JPS584942A (ja) | 1981-06-30 | 1981-06-30 | 半導体素子の試験方法及びこの方法に用いられる半導体素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56102914A JPS584942A (ja) | 1981-06-30 | 1981-06-30 | 半導体素子の試験方法及びこの方法に用いられる半導体素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS584942A JPS584942A (ja) | 1983-01-12 |
| JPS6344295B2 true JPS6344295B2 (de) | 1988-09-05 |
Family
ID=14340116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56102914A Granted JPS584942A (ja) | 1981-06-30 | 1981-06-30 | 半導体素子の試験方法及びこの方法に用いられる半導体素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS584942A (de) |
-
1981
- 1981-06-30 JP JP56102914A patent/JPS584942A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS584942A (ja) | 1983-01-12 |
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