JPS6343444Y2 - - Google Patents
Info
- Publication number
- JPS6343444Y2 JPS6343444Y2 JP1981188706U JP18870681U JPS6343444Y2 JP S6343444 Y2 JPS6343444 Y2 JP S6343444Y2 JP 1981188706 U JP1981188706 U JP 1981188706U JP 18870681 U JP18870681 U JP 18870681U JP S6343444 Y2 JPS6343444 Y2 JP S6343444Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- float
- liquid substance
- holder
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 12
- 239000000126 substance Substances 0.000 claims description 12
- 238000007689 inspection Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981188706U JPS5893909U (ja) | 1981-12-18 | 1981-12-18 | 載物台 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981188706U JPS5893909U (ja) | 1981-12-18 | 1981-12-18 | 載物台 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5893909U JPS5893909U (ja) | 1983-06-25 |
| JPS6343444Y2 true JPS6343444Y2 (enExample) | 1988-11-14 |
Family
ID=30103000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981188706U Granted JPS5893909U (ja) | 1981-12-18 | 1981-12-18 | 載物台 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5893909U (enExample) |
-
1981
- 1981-12-18 JP JP1981188706U patent/JPS5893909U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5893909U (ja) | 1983-06-25 |
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