JPS6342135Y2 - - Google Patents

Info

Publication number
JPS6342135Y2
JPS6342135Y2 JP1984162335U JP16233584U JPS6342135Y2 JP S6342135 Y2 JPS6342135 Y2 JP S6342135Y2 JP 1984162335 U JP1984162335 U JP 1984162335U JP 16233584 U JP16233584 U JP 16233584U JP S6342135 Y2 JPS6342135 Y2 JP S6342135Y2
Authority
JP
Japan
Prior art keywords
protective cover
crucible
vapor deposition
insulating member
deposition material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984162335U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6178862U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984162335U priority Critical patent/JPS6342135Y2/ja
Publication of JPS6178862U publication Critical patent/JPS6178862U/ja
Application granted granted Critical
Publication of JPS6342135Y2 publication Critical patent/JPS6342135Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984162335U 1984-10-29 1984-10-29 Expired JPS6342135Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984162335U JPS6342135Y2 (enrdf_load_stackoverflow) 1984-10-29 1984-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984162335U JPS6342135Y2 (enrdf_load_stackoverflow) 1984-10-29 1984-10-29

Publications (2)

Publication Number Publication Date
JPS6178862U JPS6178862U (enrdf_load_stackoverflow) 1986-05-26
JPS6342135Y2 true JPS6342135Y2 (enrdf_load_stackoverflow) 1988-11-04

Family

ID=30720222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984162335U Expired JPS6342135Y2 (enrdf_load_stackoverflow) 1984-10-29 1984-10-29

Country Status (1)

Country Link
JP (1) JPS6342135Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52100052U (enrdf_load_stackoverflow) * 1976-01-26 1977-07-28

Also Published As

Publication number Publication date
JPS6178862U (enrdf_load_stackoverflow) 1986-05-26

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