JPS6341156U - - Google Patents
Info
- Publication number
- JPS6341156U JPS6341156U JP1986135959U JP13595986U JPS6341156U JP S6341156 U JPS6341156 U JP S6341156U JP 1986135959 U JP1986135959 U JP 1986135959U JP 13595986 U JP13595986 U JP 13595986U JP S6341156 U JPS6341156 U JP S6341156U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- thickness
- sides
- linear side
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986135959U JPH0518758Y2 (no) | 1986-09-04 | 1986-09-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986135959U JPH0518758Y2 (no) | 1986-09-04 | 1986-09-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6341156U true JPS6341156U (no) | 1988-03-17 |
JPH0518758Y2 JPH0518758Y2 (no) | 1993-05-18 |
Family
ID=31038632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986135959U Expired - Lifetime JPH0518758Y2 (no) | 1986-09-04 | 1986-09-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0518758Y2 (no) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917441U (ja) * | 1982-07-23 | 1984-02-02 | 日東電工株式会社 | フオトマスク |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917441B2 (ja) * | 1975-02-26 | 1984-04-21 | 豊田工機株式会社 | 測定装置を備えた工具台送り制御装置 |
-
1986
- 1986-09-04 JP JP1986135959U patent/JPH0518758Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5917441U (ja) * | 1982-07-23 | 1984-02-02 | 日東電工株式会社 | フオトマスク |
Also Published As
Publication number | Publication date |
---|---|
JPH0518758Y2 (no) | 1993-05-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6341156U (no) | ||
JPS6488546A (en) | Method for exposing thick film resist | |
JPS59109349U (ja) | フオトマスク基板 | |
JPS5923414Y2 (ja) | 両面目合せ露光機のウエ−ハチヤツク機構 | |
JPS58419U (ja) | レチクル | |
JPS63188938U (no) | ||
JPS6398544U (no) | ||
JPS6445841U (no) | ||
JPS62204324U (no) | ||
JPS6322730U (no) | ||
JPS6181657U (no) | ||
JPH025754U (no) | ||
JPS61193454U (no) | ||
JPS6157519U (no) | ||
JPS6417431A (en) | Manufacture of semiconductor integrated circuit device | |
JPS62149130A (ja) | サイドウオ−ル形成方法 | |
JPS6316437U (no) | ||
JPH0373428U (no) | ||
JPS58118746U (ja) | ウエハチヤツク | |
JPH0173848U (no) | ||
JPS59104145U (ja) | フオトマスク | |
JPS53139982A (en) | Exposure apparatus of semiconductor substrates | |
JPH0457854U (no) | ||
JPS61140354U (no) | ||
JPH0171437U (no) |