JPS6339930Y2 - - Google Patents

Info

Publication number
JPS6339930Y2
JPS6339930Y2 JP1981047247U JP4724781U JPS6339930Y2 JP S6339930 Y2 JPS6339930 Y2 JP S6339930Y2 JP 1981047247 U JP1981047247 U JP 1981047247U JP 4724781 U JP4724781 U JP 4724781U JP S6339930 Y2 JPS6339930 Y2 JP S6339930Y2
Authority
JP
Japan
Prior art keywords
magnetic
yoke
magnetic pole
coil
pole surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981047247U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57159210U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981047247U priority Critical patent/JPS6339930Y2/ja
Publication of JPS57159210U publication Critical patent/JPS57159210U/ja
Application granted granted Critical
Publication of JPS6339930Y2 publication Critical patent/JPS6339930Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electromagnets (AREA)
JP1981047247U 1981-03-31 1981-03-31 Expired JPS6339930Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981047247U JPS6339930Y2 (cs) 1981-03-31 1981-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981047247U JPS6339930Y2 (cs) 1981-03-31 1981-03-31

Publications (2)

Publication Number Publication Date
JPS57159210U JPS57159210U (cs) 1982-10-06
JPS6339930Y2 true JPS6339930Y2 (cs) 1988-10-19

Family

ID=29844058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981047247U Expired JPS6339930Y2 (cs) 1981-03-31 1981-03-31

Country Status (1)

Country Link
JP (1) JPS6339930Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7608802B2 (en) 1999-01-06 2009-10-27 Mattson Technology, Inc. Heating device for heating semiconductor wafers in thermal processing chambers

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5366599B2 (ja) * 2009-03-13 2013-12-11 三菱電機株式会社 電磁石およびこれを用いた開閉装置
JP2012199276A (ja) * 2011-03-18 2012-10-18 Mitsubishi Electric Corp 電磁アクチュエータおよび開閉装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5178353U (cs) * 1974-12-18 1976-06-21
JPS5539633A (en) * 1978-09-12 1980-03-19 Matsushita Electric Ind Co Ltd Electromagnet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7608802B2 (en) 1999-01-06 2009-10-27 Mattson Technology, Inc. Heating device for heating semiconductor wafers in thermal processing chambers

Also Published As

Publication number Publication date
JPS57159210U (cs) 1982-10-06

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