JPS6339853U - - Google Patents

Info

Publication number
JPS6339853U
JPS6339853U JP13307086U JP13307086U JPS6339853U JP S6339853 U JPS6339853 U JP S6339853U JP 13307086 U JP13307086 U JP 13307086U JP 13307086 U JP13307086 U JP 13307086U JP S6339853 U JPS6339853 U JP S6339853U
Authority
JP
Japan
Prior art keywords
ion beam
ion
exb
mass separator
species
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13307086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0539555Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986133070U priority Critical patent/JPH0539555Y2/ja
Publication of JPS6339853U publication Critical patent/JPS6339853U/ja
Application granted granted Critical
Publication of JPH0539555Y2 publication Critical patent/JPH0539555Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP1986133070U 1986-08-29 1986-08-29 Expired - Lifetime JPH0539555Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986133070U JPH0539555Y2 (enrdf_load_stackoverflow) 1986-08-29 1986-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986133070U JPH0539555Y2 (enrdf_load_stackoverflow) 1986-08-29 1986-08-29

Publications (2)

Publication Number Publication Date
JPS6339853U true JPS6339853U (enrdf_load_stackoverflow) 1988-03-15
JPH0539555Y2 JPH0539555Y2 (enrdf_load_stackoverflow) 1993-10-07

Family

ID=31033047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986133070U Expired - Lifetime JPH0539555Y2 (enrdf_load_stackoverflow) 1986-08-29 1986-08-29

Country Status (1)

Country Link
JP (1) JPH0539555Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220263A (ja) * 1985-03-27 1986-09-30 Hitachi Ltd イオンマイクロビ−ム装置
JPS62103949A (ja) * 1985-10-30 1987-05-14 Jeol Ltd 集束イオンビ−ム装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220263A (ja) * 1985-03-27 1986-09-30 Hitachi Ltd イオンマイクロビ−ム装置
JPS62103949A (ja) * 1985-10-30 1987-05-14 Jeol Ltd 集束イオンビ−ム装置

Also Published As

Publication number Publication date
JPH0539555Y2 (enrdf_load_stackoverflow) 1993-10-07

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