JPS6271865U - - Google Patents

Info

Publication number
JPS6271865U
JPS6271865U JP16389885U JP16389885U JPS6271865U JP S6271865 U JPS6271865 U JP S6271865U JP 16389885 U JP16389885 U JP 16389885U JP 16389885 U JP16389885 U JP 16389885U JP S6271865 U JPS6271865 U JP S6271865U
Authority
JP
Japan
Prior art keywords
ion
source section
beam pipe
ion source
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16389885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16389885U priority Critical patent/JPS6271865U/ja
Publication of JPS6271865U publication Critical patent/JPS6271865U/ja
Pending legal-status Critical Current

Links

JP16389885U 1985-10-24 1985-10-24 Pending JPS6271865U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16389885U JPS6271865U (enrdf_load_stackoverflow) 1985-10-24 1985-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16389885U JPS6271865U (enrdf_load_stackoverflow) 1985-10-24 1985-10-24

Publications (1)

Publication Number Publication Date
JPS6271865U true JPS6271865U (enrdf_load_stackoverflow) 1987-05-08

Family

ID=31092522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16389885U Pending JPS6271865U (enrdf_load_stackoverflow) 1985-10-24 1985-10-24

Country Status (1)

Country Link
JP (1) JPS6271865U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0224946A (ja) * 1988-07-13 1990-01-26 Origin Electric Co Ltd 低加速イオンビーム照射装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891643A (ja) * 1981-11-26 1983-05-31 Fujitsu Ltd 電子ビ−ムアニ−ル方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891643A (ja) * 1981-11-26 1983-05-31 Fujitsu Ltd 電子ビ−ムアニ−ル方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0224946A (ja) * 1988-07-13 1990-01-26 Origin Electric Co Ltd 低加速イオンビーム照射装置

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