JPS61156173U - - Google Patents

Info

Publication number
JPS61156173U
JPS61156173U JP3931785U JP3931785U JPS61156173U JP S61156173 U JPS61156173 U JP S61156173U JP 3931785 U JP3931785 U JP 3931785U JP 3931785 U JP3931785 U JP 3931785U JP S61156173 U JPS61156173 U JP S61156173U
Authority
JP
Japan
Prior art keywords
ion
ion species
implantation
species
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3931785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3931785U priority Critical patent/JPS61156173U/ja
Publication of JPS61156173U publication Critical patent/JPS61156173U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP3931785U 1985-03-18 1985-03-18 Pending JPS61156173U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3931785U JPS61156173U (enrdf_load_stackoverflow) 1985-03-18 1985-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3931785U JPS61156173U (enrdf_load_stackoverflow) 1985-03-18 1985-03-18

Publications (1)

Publication Number Publication Date
JPS61156173U true JPS61156173U (enrdf_load_stackoverflow) 1986-09-27

Family

ID=30547159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3931785U Pending JPS61156173U (enrdf_load_stackoverflow) 1985-03-18 1985-03-18

Country Status (1)

Country Link
JP (1) JPS61156173U (enrdf_load_stackoverflow)

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