JPS6293366U - - Google Patents

Info

Publication number
JPS6293366U
JPS6293366U JP18622385U JP18622385U JPS6293366U JP S6293366 U JPS6293366 U JP S6293366U JP 18622385 U JP18622385 U JP 18622385U JP 18622385 U JP18622385 U JP 18622385U JP S6293366 U JPS6293366 U JP S6293366U
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JP
Japan
Prior art keywords
target
shield
covered
ions
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18622385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342608Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18622385U priority Critical patent/JPH0342608Y2/ja
Publication of JPS6293366U publication Critical patent/JPS6293366U/ja
Application granted granted Critical
Publication of JPH0342608Y2 publication Critical patent/JPH0342608Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP18622385U 1985-12-02 1985-12-02 Expired JPH0342608Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18622385U JPH0342608Y2 (enrdf_load_stackoverflow) 1985-12-02 1985-12-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18622385U JPH0342608Y2 (enrdf_load_stackoverflow) 1985-12-02 1985-12-02

Publications (2)

Publication Number Publication Date
JPS6293366U true JPS6293366U (enrdf_load_stackoverflow) 1987-06-15
JPH0342608Y2 JPH0342608Y2 (enrdf_load_stackoverflow) 1991-09-06

Family

ID=31135583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18622385U Expired JPH0342608Y2 (enrdf_load_stackoverflow) 1985-12-02 1985-12-02

Country Status (1)

Country Link
JP (1) JPH0342608Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0342608Y2 (enrdf_load_stackoverflow) 1991-09-06

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